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Synthesis and Characterization of Nanostructured a-C:H (Hydrogenated Amorphous Carbon) Thin Films by Gaseous Thermionic Vacuum Arc (G-TVA) Deposition Technique

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Abstract

The aim of this contribution is to present the properties of the nanostructured hydrogenated carbon thin films and to study their growth carried out in a special deposition technique based on Thermionic Vacuum Arc method. The Gaseous Thermionic Vacuum Arc (G-TVA) technology is an original deposition method performed in a special configuration, consisting of a heated thermionic cathode which provides an electron beam on the anode. The surface free energy was evaluated by contact angle and their optical properties were studied by Filmetrics F20 spectrometry system. Structure of the film has been investigated by Raman spectroscopy as well as the mechanical properties like hardness, wear resistance, film-substrate adhesion. The films showed two distinct Raman characteristic peaks located at 1,350 cm−1 (D-line) and 1,550 cm−1 (G-line), broad for Si and very sharp for glass substrates. The G-TVA enables to prepare soft (hardness ~6 GPa) or hard (~24 GPa) films.

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Acknowledgments

This work was supported by the strategic grant POSDRU/89/1.5/S/58852, Project “Postdoctoral programme for training scientific researchers” cofinanced by the European Social Found within the Sectorial Operational Program Human Resources Development 2007–2013. The nanoindentation tests were supported by the Academy of Science of the Czech Republic in the frame of project KAN311610701.

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Authors and Affiliations

  1. Department of Physics, Ovidius University, 900527, Constanţa, Romania

    Rodica Vladoiu, Victor Ciupina, Mirela Contulov, Virginia Dinca & Aurelia Mandes

  2. Department of Physical Electronics, Masaryk University, 61137, Brno, Czech Republic

    Vilma Bursikova

Authors
  1. Rodica Vladoiu
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  2. Victor Ciupina
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  3. Mirela Contulov
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  4. Virginia Dinca
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  5. Aurelia Mandes
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  6. Vilma Bursikova
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Correspondence to Mirela Contulov.

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Vladoiu, R., Ciupina, V., Contulov, M. et al. Synthesis and Characterization of Nanostructured a-C:H (Hydrogenated Amorphous Carbon) Thin Films by Gaseous Thermionic Vacuum Arc (G-TVA) Deposition Technique. Plasma Chem Plasma Process 32, 219–229 (2012). https://doi.org/10.1007/s11090-011-9344-x

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  • DOI: https://doi.org/10.1007/s11090-011-9344-x

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