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The enhanced terahertz absorption of metal gratings/Si-based blocked-impurity-band (BIB) hybrid structures

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Abstract

Terahertz (THz) detecting technology has attracted many attentions. In this work, a novel THz detector based on a metal gratings/Si-based blocked-impurity-band (BIB) hybrid structure was designed and theoretically calculated. The highly integrated hybrid structure was found useful for modulating the response wavelength and improving the responsivity of Si-based BIB detector. The enhanced THz absorption of the hybrid device structure of metal gratings and Si-based BIB absorption layer was carefully investigated by finite difference time domain. The peak wavelength can be moved from 26.9 to 36.53 μm when metal gratings (period: 32 μm) were added on the Si-based BIB. The peak absorptivity of the hybrid detector was increased by 87.3 % with the metal gratings, compared with that of conventional Si-based BIB detector. Our results indicate that a highly integrated hybrid device structure can replace the divided band filters, and realize selective resonant enhanced absorption and tunable THz spectral response.

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References

  • Abdullah, M., Mohammed Noori, F.T., Al-Khursan, A.H.: Terahertz emission in ladder plus Y-configurations in double quantum dot structure. Appl. Opt. 54, 5186–5192 (2015)

    Article  ADS  Google Scholar 

  • Abdullah, M., Noori, F.T.M., Al-Khursan, A.H.: Millimeter waves from frequency generation and optical rectification in quantum dot structure. Opt. Quant. Electron. 48, 15 (2016)

    Article  Google Scholar 

  • Aronzon, B.A., Kovalev, D.Y., Kozlov, A.M., Leotin, J., Ryl’kov, V.V.: Current-voltage characteristics of Si:B blocked impurity-band structures under conditions of hopping-transport-limited photoresponse. Semiconductors 32, 174–180 (1998)

    Article  ADS  Google Scholar 

  • Bandaru, J., Beeman, J.W., Haller, E.E., Samperi, S., Haegel, N.M.: Influence of the Sb dopant distribution on far infrared photoconductivity in Ge:Sb blocked impurity band detectors. Infrared Phys. Technol. 43, 353–360 (2002)

    Article  ADS  Google Scholar 

  • Beeman, J.W., Goyal, S., Reichertz, L.A., Haller, E.E.: Ion-implanted Ge:B far-infrared blocked-impurity-band detectors. Infrared Phys. Technol. 51, 60–65 (2007)

    Article  ADS  Google Scholar 

  • Cardozo, B.L., Reichertz, L.A., Beeman, J.W., Haller, E.E.: Characterization of liquid phase epitaxial GaAs for blocked-impurity-band far-infrared detectors. Infrared Phys. Technol. 46, 400–407 (2005)

    Article  ADS  Google Scholar 

  • Chen, Y., Yang, X., Tong, W., Wang, B., Zhang, C., Zhang, H., Hu, Y., Pan, M., Wang, X.: The simulation on absorption properties of metamaterial/GaAs/electrode layer hybrid structure based Terahertz photoconductive detector. Opt. Quant. Electron. 51, 118 (2019)

    Article  Google Scholar 

  • Collaboration, T., Collaboration, t, Abbott, B., Abbott, R., Abbott, T., Acernese, F., Ackley, K., Adams, C., Adams, T., Addesso, P., Adhikari, R., Adya, V., Affeldt, C., Afrough, M., Agarwal, B., Agathos, M., Agatsuma, K., Aggarwal, N., Aguiar, O., Zweizig, J.: First narrow-band search for continuous gravitational waves from known pulsars in advanced detector data. Physical Review D, 96 (2017)

  • Dotson, J., McKelvey, M., McMurray, R., Goebel, J., Mainzer, A.: Cryogenic testing of a 1024 × 1024 Si:As array for WISE. Optical Engineering + Applications, 6690 (2007)

  • Fazio, G., Eisenhardt, P.: The space infrared telescope facility (SIRTF). Int. Astron. Union Colloquium 123, 193–203 (1990)

    Article  Google Scholar 

  • Fazio, G.G., Hora, J.L., Allen, L.E., Ashby, M.L.N., Barmby, P., Deutsch, L.K., Huang, J.S., Kleiner, S., Marengo, M., Megeath, S.T., Melnick, G.J., Pahre, M.A., Patten, B.M., Polizotti, J., Smith, H.A., Taylor, R.S., Wang, Z., Willner, S.P., Hoffmann, W.F., Pipher, J.L., Forrest, W.J., McMurty, C.W., McCreight, C.R., McKelvey, M.E., McMurray, R.E., Koch, D.G., Moseley, S.H., Arendt, R.G., Mentzell, J.E., Marx, C.T., Losch, P., Mayman, P., Eichhorn, W., Krebs, D., Jhabvala, M., Gezari, D.Y., Fixsen, D.J., Flores, J., Shakoorzadeh, K., Jungo, R., Hakun, C., Workman, L., Karpati, G., Kichak, R., Whitley, R., Mann, S., Tollestrup, E.V., Eisenhardt, P., Stern, D., Gorjian, V., Bhattacharya, B., Carey, S., Nelson, B.O., Glaccum, W.J., Lacy, M., Lowrance, P.J., Laine, S., Reach, W.T., Stauffer, J.A., Surace, J.A., Wilson, G., Wright, E.L., Hoffman, A., Domingo, G.: Cohen, M.: The Infrared Array Camera (IRAC) for theSpitzer Space Telescope. The Astrophysical Journal Supplement Series, 154, 10–17 (2004)

  • Ferguson, B., Zhang, X.-C.: Materials for terahertz science and technology. Nat. Mater. 1, 26–33 (2002)

    Article  ADS  Google Scholar 

  • Fujii, G., Ukibe, M., Ohkubo, M.: Improvement of soft x-ray detection performance in superconducting-tunnel-junction array detectors with close-packed arrangement by three-dimensional structure. Supercond. Sci. Technol. 28, 104005 (2015)

    Article  ADS  Google Scholar 

  • Garcia-Vidal, F., Martín-Moreno, L.: Transmission and Focusing of Light in One- Dimensional Periodically Nanostructured Metals. Phys. Rev. B, 66 (2002)

  • Ginn, J.C., Jarecki, R.L., Shaner, E.A., Davids, P.S.: Infrared plasmons on heavily-doped silicon. J. Appl. Phys. 110, 043110 (2011)

    Article  ADS  Google Scholar 

  • Hanaoka, M., Kaneda, H., Oyabu, S., Yamagishi, M., Hattori, Y., Ukai, S., Shichi, K., Wada, T., Suzuki, T., Watanabe, K., Nagase, K., Baba, S., Kochi, C.: Development of Blocked-Impurity-Band-Type Ge Detectors Fabricated with the Surface-Activated Wafer Bonding Method for Far-Infrared Astronomy. J. Low Temp. Phys. 184, 225–230 (2016)

    Article  ADS  Google Scholar 

  • Harrer, A., Schwarz, B., Gansch, R., Reininger, P., Detz, H., Zederbauer, T., Andrews, A.M., Schrenk, W., Strasser, G.: Plasmonic lens enhanced mid-infrared quantum cascade detector. Appl. Phys. Lett. 105, 171112 (2014)

    Article  ADS  Google Scholar 

  • Hogue, H., Mattson, R., Stapelbroek, M., Masterjohn, S., Larsen, M., Elwell, J.: Focal plane detectors for the WISE 12- and 23-µm bands. Photonic Devices + Applications, 6660 (2007)

  • Huffman, J., Crouse, A., Halleck, B., Downes, T., Herter, T.: Si:Sb blocked impurity band detectors for infrared astronomy. J. Appl. Phys. 72, 273–275 (1992)

    Article  ADS  Google Scholar 

  • Hu, X., Li, M., Ye, Z., Leung, W.Y., Ho, K.-M., Lin, S.-Y.: Design of midinfrared photodetectors enhanced by resonant cavities with subwavelength metallic gratings. Appl. Phys. Lett. 93, 241108 (2008)

    Article  ADS  Google Scholar 

  • Jackson, E., Nolde, J., Kim, M., Kim, C.S., Cleveland, E., Affouda, C., Canedy, C., Vurgaftman, I., Meyer, R., Aifer, E., Lorentzen, J.: Two-dimensional plasmonic grating for increased quantum efficiency in midwave infrared nBn detectors with thin absorbers. Opt. Express 26, 13850 (2018)

    Article  ADS  Google Scholar 

  • Jepsen, P.U., Cooke, D.G., Koch, M.: Terahertz spectroscopy and imaging – Modern techniques and applications. Laser Photonics Rev. 5, 124–166 (2011)

    Article  ADS  Google Scholar 

  • Jones, D.H., Shopbell, P.L., Bland-Hawthorn, J.: Detection and measurement from narrow-band tunable filter scans. Mon. Not. R. Astron. Soc. 329, 759–774 (2002)

    Article  ADS  Google Scholar 

  • Liao, K.S., Li, N., Wang, C., Li, L., Jing, Y.L., Wen, J., Li, M.Y., Wang, H., Zhou, X.H., Li, Z.F., Lu, W.: Extended mode in blocked impurity band detectors for terahertz radiation detection. Appl. Phys. Lett. 105, 143501 (2014)

    Article  ADS  Google Scholar 

  • Mainzer, A., Larsen, M., Stapelbroek, M., Hogue, H., Garnett, J., Zandian, M., Mattson, R., Masterjohn, S., Livingston, J., Lingner, N., Alster, N., Ressler, M., Masci, F.: Characterization of Flight Detector Arrays for the Wide-field Infrared Survey Explorer. SPIE vol. 7021, 7021 (2008)

  • Pendry, J., Holden, A., Stewart, W., Youngs, I.I.: Extremely Low Frequency Plasmons in Metallic Mesostructures. Physical review letters 76, 4773–4776 (1996)

    Article  ADS  Google Scholar 

  • Pendry, J.B., Holden, A., Robbins, D.J., Stewart, W.J.: Magnetism from Conductors, and Enhanced Non-linear Phenomena. Microwave Theory and Techniques, IEEE Transactions on, 47, 2075–2084 (1999)

  • Petroff, M.D., Stapelbroek, M.G.: Blocked Impurity Band Detectors. US Patent. No 4, 568,960 (1986)

    Google Scholar 

  • Rabanus, D., Graf, U., Philipp, M., Ricken, O., Stutzki, J., Vowinkel, B., Wiedner, M., Walther, C., Fischer, M., Faist, J.: Phase locking of a 1.5 Terahertz quantum cascade laser and use as a local oscillator in a heterodyne HEB receiver. Optics express 17, 1159–1168 (2009)

    Article  ADS  Google Scholar 

  • Rauter, P., Fromherz, T., Winnerl, S., Zier, M., Kolitsch, A., Helm, M., Bauer, G.: Terahertz Si:B blocked-impurity-band detectors defined by nonepitaxial methods. Appl. Phys. Lett. 93, 261104–261104 (2008)

    Article  ADS  Google Scholar 

  • Reichertz, L., Cardozo, B., Beeman, J., Larsen, D., Tschanz, S., Jakob, G., Katterloher, R., Haegel, N., Haller, E.: First results on GaAs Blocked Impurity Band (BIB) structures for far. -infrared detector arrays. 5883, 164–171 (2005)

    Google Scholar 

  • Sheng, P., Stepleman, R.S., Sanda, P.N.: Exact eigenfunctions for square-wave gratings: Application to diffraction and surface-plasmon calculations. Phys. Rev. B 26, 2907–2916 (1982)

    Article  ADS  Google Scholar 

  • Tonouchi, M.: Cutting-edge terahertz technology. Nat. Photonics 1, 97–105 (2007)

    Article  ADS  Google Scholar 

  • Wada, T., Arai, Y., Baba, S., Hanaoka, M., Hattori, Y., Ikeda, H., Kaneda, H., Kochi, C., Miyachi, A., Nagase, K., Nakaya, H., Ohno, M., Oyabu, S., Suzuki, T., Ukai, S., Watanabe, K., Yamamoto, K.: Development for Germanium Blocked Impurity Band Far-Infrared Image Sensors with Fully-Depleted Silicon-On-Insulator CMOS Readout Integrated Circuit. J. Low Temp. Phys. 184, 217–224 (2016)

    Article  ADS  Google Scholar 

  • Wang, X., Wang, B., Chen, Y., Hou, L., Xie, W., Chen, X., Pan, M.: Spectral response characteristics of novel ion-implanted planar GaAs blocked-impurity-band detectors in the terahertz domain. Opt. Quant. Electron. 48, 518 (2016a)

    Article  Google Scholar 

  • Wang, X., Wang, B., Hou, L., Xie, W., Chen, X., Pan, M.: Analysis of dark current and spectral response mechanisms for Si-based block-impurity-band detectors operating at terahertz regime. Opt. Quant. Electron. 48, 100 (2016b)

    Article  Google Scholar 

  • Wang, X., Chen, Y., Chen, X., Wang, B., Zhang, C., Zhang, H., Pan, M.: Dark current transport mechanism associated with acceptor concentration in GaAs-based blocked-impurity-band (BIB) detectors. Opt. Quant. Electron. 50, 419 (2017)

    Article  Google Scholar 

  • Watson, D., Huffman, J.: Germanium blocked-impurity‐band far‐infrared detectors. Appl. Phys. Lett. 52, 1602–1604 (1988)

    Article  ADS  Google Scholar 

  • Watson, D.M., Guptill, M.T., Huffman, J.E., Krabach, T.N., Raines, S.N., Satyapal, S.: Germanium blocked-impurity‐band detector arrays: Unpassivated devices with bulk substrates. J. Appl. Phys. 74, 4199–4206 (1993)

    Article  ADS  Google Scholar 

  • Wilson, P.A., Sing, D.K., Nikolov, N., Lecavelier des Etangs, A., Pont, F., Fortney, J.J., Ballester, G.E., López-Morales, M., Désert, J.M., Vidal-Madjar, A.: GTC OSIRIS transiting exoplanet atmospheric survey: detection of potassium in HAT-P-1b from narrow-band spectrophotometry★. Mon. Not. R. Astron. Soc. 450, 192–200 (2015)

    Article  ADS  Google Scholar 

  • Wright, E., Eisenhardt, P., Mainzer, A., Ressler, M., Cutri, R., Kirkpatrick, J., Padgett, D., McMillan, R., Skrutskie, M., Stanford, A., Cohen, M., Walker, R., Mather, J., Leisawitz, D., Iii, T., McLean, I., Benford, D., Lonsdale, C., Tsai, C.-W.: The Wide-field Infrared Survey Explorer (WISE): Mission Description and Initial On-orbit Performance. The Astronomical Journal 140, 1868 (2010)

    Article  ADS  Google Scholar 

  • Zhu, H., Weng, Z., Zhu, J., Wu, H., Li, N., Dai, N.: Comparison of Photoresponse of Si-Based BIB THz Detectors. IEEE Trans. Electron. Devices 64, 1094–1099 (2017a)

    Article  ADS  Google Scholar 

  • Zhu, H., Weng, Z., Zhu, J., Xu, J., Wu, H., Dai, N.: Surface plasmon enhanced Si-based BIB terahertz detectors. Appl. Phys. Lett. 111, 053505 (2017b)

    Article  ADS  Google Scholar 

  • Zhu, J., Zhu, H., Xu, H., Weng, Z., Wu, H.: Ge-based mid-infrared blocked-impurity-band photodetectors. Infrared Phys. Technol. 92, 13–17 (2018)

    Article  ADS  Google Scholar 

  • Zhu, H., Wang, C., Wang, P., He, J., Hu, W.: Optimized Si-Based Blocked Impurity Band Detector Under Alternative Operational Mode. IEEE Trans. Electron Devices pp 1–5 (2019)

    Google Scholar 

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Funding

This work was supported by the National Natural Science Foundation of China (Grant Nos. 61404120, 61705201, and 62171286), Shanghai Outstanding Academic Leaders Plan (21XD1423600), Shanghai Sailing Program (Grant No. 17YF1418100), Shanghai Rising-Star Program (Grant No. 17QB1403900), Young Elite Scientists Sponsorship Program by CAST (Grant No. 2018QNRC001), and Shanghai Youth Top-Notch Talent Development Program.

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Authors and Affiliations

  1. The 50th Research Institute of China Electronics Technology Group Corporation, 318 Chang He Road, Shanghai, 200331, China

    Wulin Tong, Yulu Chen, Bingbing Wang, Wenhui Liu, Dong Chen, Yongshan Hu & Xiaodong Wang

  2. Shanghai Institute of Microsystem and Information Technology, 865 Changning Road, Shanghai, 200050, China

    Bingbing Wang

  3. State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, 500 Yu Tian Road, Shanghai, 200083, China

    Lin Wang & Wanlong Guo

  4. University of Chinese Academy of Sciences, 19 Yuquan Road, Beijing, 100049, China

    Lin Wang & Wanlong Guo

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  1. Wulin Tong
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  2. Yulu Chen
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Tong, W., Chen, Y., Wang, L. et al. The enhanced terahertz absorption of metal gratings/Si-based blocked-impurity-band (BIB) hybrid structures. Opt Quant Electron 53, 627 (2021). https://doi.org/10.1007/s11082-021-03229-8

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