Abstract
In this study, diamond films were synthesized on directed Si and improved nucleation nano-iron layer Si substrates using B2O3 in ethanol and hydrogen gas mixture by hot filament chemical vapor deposition method. To investigate the role of catalyst in purity, cluster size, growth rate and conductivity of grown boron-doped films, the boron to carbon ratio was constant. Raman spectroscopy, field emission scanning electron microscopy and four point probe techniques were applied to characterize the properties of films. It was found that nano-iron layer leads to deposit boron-doped diamond film with better structural quality as well as more effective boron doping concentration. This rising in the conductivity of the grown film on Fe-coated substrate can be mainly attributed to the catalytic activity of iron to increase the diamond cluster size as well as reduce the formation of pores and amorphous phases. Moreover, a 25 % increase in film thickness assisted by iron-catalyst was observed.
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17 July 2023
This article has been retracted. Please see the Retraction Notice for more detail: https://doi.org/10.1007/s10904-023-02794-7
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Azadfar, P., Ghoranneviss, M., Elahi, S.M. et al. RETRACTED ARTICLE: The Impact of Improved Nucleation Layer on the Properties of Boron-Doped Diamond Films. J Inorg Organomet Polym 25, 1040–1043 (2015). https://doi.org/10.1007/s10904-015-0207-4
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DOI: https://doi.org/10.1007/s10904-015-0207-4