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Tuning work function and surface-modified AZO films on FTO substrate to improve the efficiency of thin-film silicon solar cells

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Abstract

Light trapping plays a critical role in improving the current density of thin-film silicon solar cells. However, commercial fluorine-doped tin oxide (FTO) substrates have limitations in enhancing current density in a specific wavelength range due to weak haze values in the long wavelength range, particularly for amorphous or microcrystalline silicon absorber layers. This problem may be caused by damage from hydrogen plasma during the deposition of hydrogenated silicon. To address this issue, a sputtered AZO film is used as a protective layer on the FTO substrate, enhancing light scattering in the near-infrared region. After optimizing the target angle (47.5 degrees) and thickness (60.9 nm) of the AZO film, thin-film silicon solar cells based on an amorphous silicon layer achieved a current density of 15.31 mA/cm2 compared to 14.22 mA/cm2 for the FTO substrate. The efficiency also improved to 9.63% as the fill factor increased to 70.62%.

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Data availability

The datasets generated during and/or analyzed during the current study are available from the corresponding author on reasonable request.

References

  1. H. Li, Y. Hu, H. Wang, Q. Tao, Y. Zhu, Y. Yang, Sol. RRL 5, 2000524 (2021)

    Article  CAS  Google Scholar 

  2. B. Rech, H. Wagner, Appl. Phys. A 69, 155–167 (1999)

    Article  CAS  Google Scholar 

  3. B. Rech, O. Kluth, T. Repmann, T. Roschek, J. Springer, J. Müller, F. Finger, H. Stiebig, H. Wanger, Sol. Energy Mater. Sol. Cells 74, 439–447 (2002)

    Article  CAS  Google Scholar 

  4. C. Agashe, O. Kluth, G. Schöpe, H. Siekemann, J. Hüpkes, B. Rech, Thin Solid Films 442, 167–172 (2003)

    Article  CAS  Google Scholar 

  5. J. Springer, B. Rech, W. Reetz, J. Müller, M. Vanecek, Sol. Energy Mater. Sol. Cells 85, 1–11 (2005)

    CAS  Google Scholar 

  6. F. Ruske, C. Jacobs, V. Sittinger, B. Szyszka, W. Werner, Thin Solid Films 515, 8695–8698 (2007)

    Article  CAS  Google Scholar 

  7. M. Berginski, J. Hüpkes, W. Reetz, B. Rech, M. Wuttig, Thin Solid Films 516, 5836–5841 (2008)

    Article  CAS  Google Scholar 

  8. M. Berginski, J. Hüpkes, A. Gordijn, W. Reetz, T. Wätjen, B. Rech, M. Wuttig, Sol. Energy Mater. Sol. Cells 92, 1037–1042 (2008)

    Article  CAS  Google Scholar 

  9. M. Python, O. Madani, D. Domine, F. Meillaud, E.V. -Sauvain, C. Ballif, Sol. Energy Mater. Sol. Cells 93, 1714–1720 (2009)

    Article  CAS  Google Scholar 

  10. J. Krc, B. Lipovsek, M. Bokalic, A. Campa, T. Oyama, M. Kambe, T. Matsui, H. Sai, M. Kondo, M. Topic, Thin Solid Films 518, 3054–3058 (2010)

    Article  CAS  Google Scholar 

  11. C.-H. Lee, M. Shin, M.-H. Lim, J.-Y. Seo, H.-Y. Lee, B.-J. Kim, D. Choi, Sol. Energy Mater. Sol. Cells 95, 207–210 (2011)

    Article  CAS  Google Scholar 

  12. S. Nicolay, M. Despeisse, F.-J. Haug, C. Ballif, Sol. Energy Mater. Sol. Cells 93, 1031–1034 (2011)

    Article  Google Scholar 

  13. V. Smirnov, A. Lambertz, B. Grootoonk, R. Carius, F. Finger, J. Non-Cryst Solids 358, 1954–1957 (2012)

    Article  CAS  Google Scholar 

  14. A. Hongsinthong, T. Krajangsang, I.A. Yunaz, S. Miyajima, M. Konagai, Appl. Phys. Express 3, 051102 (2010)

    Article  Google Scholar 

  15. H. Park, D. Kim, Trans. Electr. Electron. Mater. 22, 80–90 (2021)

    Article  Google Scholar 

  16. N. Chantarat, S. Hsu, C. Lin, M. Chiang, S. Chen, J. Mater. Chem. 22, 8005–8012 (2012)

    Article  CAS  Google Scholar 

  17. H. Park, J. Lee, H. Kim, D. Kim, J. Raja, J. Yi, Appl. Phys. Lett. 102, 191602 (2013)

    Article  Google Scholar 

  18. K. Ravichandran, N.J. Begum, K. Swaminathan, B.B. Sakthivel, Superlattices Microstruct. 64, 185–195 (2013)

    Article  CAS  Google Scholar 

  19. Y. Lin, S. Lien, Y. Huang, C. Wang, C. Liu, A. Nautiyal, D. Wuu, S. Lee, Thin Solid Films 529, 50–53 (2013)

    Article  CAS  Google Scholar 

  20. J. Cho, Y. Seo, B. Choi, A. Cho, A. Lee, M. Shin, K. Kim, S. Ahn, J. Park, J. Yoo, D. Shin, I. Jeong, J. Gwak, Sol. Energy Mater. Sol. Cells 202, 110078 (2019)

    Article  CAS  Google Scholar 

  21. C. Ma, X. Lu, B. Xu, F. Zhao, X. An, B. Li, L. Sun, J. Jiang, Y. Chen, J. Chu, J. Alloys Compd. 774, 201 (2019)

    Article  CAS  Google Scholar 

  22. A. Wójcicka, Z. Fogarassy, A. Rácz, T. Kravchuk, G. Sobczak, M.A. Borysiewicz, Vacuum 203, 111299 (2022)

    Article  Google Scholar 

  23. D. Han, Y. Kim, Y.-W. Kim, J.-B. Park, D.C. Kim, J. Kim, Sci. Adv. Mater. 13, 2022–2027 (2021)

    Article  CAS  Google Scholar 

  24. Y. Wang, J. Song, J. Zhang, G. Zheng, X. Duan, X. Xie, B. Han, X. Meng, F. Yang, G. Wang, Y. Zhao, J. Li, Sol. Energy 194, 4171–4477 (2019)

    Google Scholar 

  25. P. Novák, Phys. Status Solidi A 9, 1800814 (2019)

    Article  Google Scholar 

  26. D. Eisenhauer, C.T. Trinh, D. Amkreutz, C. Becker, Sol. Energy Mater. Sol. Cells 200, 109928 (2019)

    Article  CAS  Google Scholar 

  27. Y.-C. Lee, J.-Y. Juang, J. Eur. Ceram. 42, 3234–3244 (2022)

    Article  CAS  Google Scholar 

  28. B. Li, Q. Xu, L. Huang, W. Zu, N. Ren, Mater. Sci. Semicond. Process. 131, 105853 (2021)

    Article  CAS  Google Scholar 

  29. N. Sharma, R. Kumar, J. Jayabalan, Curr. Appl. Phys. 21, 58–63 (2021)

    Article  Google Scholar 

  30. J.W. Kim, A. Kim, Curr. Appl. Phys. 31, 52–59 (2021)

    Article  Google Scholar 

  31. L.D. Rao, K.S. Latha, V.R. Reddy, C.-J. Choi, Vacuum 119, 276–283 (2015)

    Article  Google Scholar 

  32. H. Park, M.Q. Khokhar, E.-C. Cho, M. Ju, Y. Kim, S. Kim, J. Yi, Optik 205, 164011 (2020)

    Article  CAS  Google Scholar 

  33. R. Varache, C. Leendertz, M.E. Gueunier-Farret, D. Muñoz, L. Korte, Sol. Energy Mater. Sol. Cells 141, 14–23 (2015)

    Article  CAS  Google Scholar 

  34. D. Rached, R. Mostefaoui, Thin Solid Films 516, 5087–5092 (2008)

    Article  CAS  Google Scholar 

  35. H.C. Weller, R.H. Mauch, G.H. Bauer, Sol. Energy Mater. Sol. Cells 27, 217–231 (1992)

    Article  CAS  Google Scholar 

  36. U. Chaitra, A.V. Muhammed Ali, M.G. Mahesha, A. Kompa, D. Kekuda, K.M. Rao, Superlattices Microstruct. 155, 106903 (2021)

    Article  CAS  Google Scholar 

  37. M. Shirazi, R.S. Dariani, M.R. Toroghinejad, J. Mater. Sci. : Mater. Electron. 27, 10226–10236 (2016)

    CAS  Google Scholar 

  38. L.-J. Huang, B.-J. Li, H. Cao, W. Zu, N.-F. Ren, H. Ding, J. Mater. Sci.: Mater. Electron 28, 4706–4712 (2017)

    CAS  Google Scholar 

  39. A. Pandey, S. Tyagi, B.P. Singh, L. Kumar, Phys. B: Condens. Matter 647, 414393 (2022)

    Article  CAS  Google Scholar 

  40. J.-S. Cho, Y.H. Seo, A. Lee, S. Park, K. Lim, A. Cho, S. Ahn, J. Yoo, J.H. Park, Appl. Surf. Sci. 589, 152936 (2022)

    Article  CAS  Google Scholar 

  41. L. Jiang, J. Li, K. Huang, S. Li, Q. Wang, Z. Sun, T. Mei, J. Wang, L. Zhang, N. Wang, ACS omega 2, 8990–8996 (2017)

    Article  CAS  Google Scholar 

  42. X. Wang, X. Wang, Q. Di, H. Zhao, B. Liang, J. Yang, Materials 10, 1398 (2017)

    Article  Google Scholar 

  43. T. Tohsophon, A. Dabirian, S. De Wolf, M. Morales-Masis, C. Ballif, APL Mater. 3, 116105 (2015)

    Article  Google Scholar 

  44. H. Fan, Z. Yang, X. Ren, M. Yin, F. Gao, S. Liu, AIP Adv 6, 015314 (2016)

    Article  Google Scholar 

  45. A. Forget, B. Limoges, V. Balland, Langmuir 31, 1931–1940 (2015)

    Article  CAS  Google Scholar 

  46. J.K. Rath, Y. Liu, M.M. de Jong, J. de Wild, J.A. Schuttauf, M. Brinza, R.E.I. Schropp, Thin Solid Films 518, e129–e135 (2010)

    Article  Google Scholar 

  47. S.H. Yu, P.C. Ho, C.L. Lee, C.C. Bi, C.H. Yeh, C.Y. Chang, Appl. Phys. Express 6, 022301 (2013)

    Article  Google Scholar 

  48. S.M. Iftiquar, S.N. Riaz, S. Mahapatra, Silicon 13, 2701–2713 (2020)

    Article  Google Scholar 

  49. H.S. Park, S.M. Iftiquar, H.W. Kim, J. Lee, A.H.T. Le, J. Yi, Semicond. Sci. Technol. 28, 115012 (2013)

    Article  Google Scholar 

Download references

Funding

This research was supported by Korea Initiative for fostering University of Research and Innovation Program of the National Research Foundation (NRF) funded by the Korean government (MSIT) (No. 2021M3H1A104892211, No. 2021R1A2C2012649).

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All authors contributed to the study conception and design. Material preparation, data collection, and analysis were performed by HGP. The first draft of the manuscript was written by HGP and all authors commented on the previous versions of the manuscript. All authors read and approved the final manuscript.

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Correspondence to Hyeong Gi Park.

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Park, H.G., Lee, JH. & Yi, J. Tuning work function and surface-modified AZO films on FTO substrate to improve the efficiency of thin-film silicon solar cells. J Mater Sci: Mater Electron 34, 1034 (2023). https://doi.org/10.1007/s10854-023-10438-2

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