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A review of thermal properties of CVD diamond films

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Abstract

Thermal management has been increasingly recognized as a limiting factor for advanced high-power electronics. Diamond can offer unique technological opportunities in the field of thermal management due to a broad range of outstanding properties, such as exceptional high thermal conductivity, high radiation hardness, unique electronic, photonic and quantum characteristics, and outstanding mechanical behavior desirable for cutting-edge electronics, optics, and extreme mechanics. Diamond films have considerable applications for heat sink and high-power chips such as high-electron-mobility transistors and quantum devices where unique electronic or quantum properties, heat transfer, and structural stability are vital. The ever-growing miniaturization of electronics and the progresses in quantum sciences all call for diamond films with desired structures and properties. This review focuses on the thermal properties of chemical vapor deposited diamond thin films, including typical processing technologies, different techniques for thermal property measurement, in-plane and cross-plane thermal properties of various diamond thin films and associated interfacial thermal conductance in addition to highlights of diamond films for thermal management and other premier applications.

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Authors and Affiliations

  1. Department of Material Science and Engineering, University of Delaware, Newark, DE, 19716, USA

    Chunyan Zhang & Chaoying Ni

  2. Blue Wave Semiconductors, Inc, 1405 S Rolling Rd, Baltimore, MD, 21227, USA

    Ratnakar D. Vispute

  3. Department of Mechanical Engineering, University of Delaware, Newark, DE, 19716, USA

    Kun Fu

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Zhang, C., Vispute, R.D., Fu, K. et al. A review of thermal properties of CVD diamond films. J Mater Sci 58, 3485–3507 (2023). https://doi.org/10.1007/s10853-023-08232-w

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