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Electron beam-induced formation of nanosized α-Fe crystals

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Focused electron beam induced chemical vapor deposition was performed in a scanning electron microscope with a field emission gun using a precursor of iron carbonyl. Due to the longer deposition time and higher gas pressure than those of our previous electron beam-induced deposition method, a new type of deposition occurred. A large amount of nanosized crystals were produced around the focused beam irradiation point on a carbon substrate at room temperature. The nanocrystals were systematically characterized using transmission electron microscopy with electron energy loss spectroscopy (EELS), and were identified to be single crystals of α-Fe.

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Authors and Affiliations

  1. High Voltage Electron Microscopy Station, National Institute for Materials Science, 3-13 Sakura, Tsukuba, 305-0003, Japan

    W. Zhang, M. Shimojo, M. Takeguchi & K. Furuya

  2. Precision and Intelligence Laboratory, Tokyo Institute of Technology, 4259 Nagatsuta, Midori, Yokohama, 226-8503, Japan

    M. Shimojo

Authors
  1. W. Zhang
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  2. M. Shimojo
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  3. M. Takeguchi
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  4. K. Furuya
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Correspondence to W. Zhang.

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Zhang, W., Shimojo, M., Takeguchi, M. et al. Electron beam-induced formation of nanosized α-Fe crystals. J Mater Sci 41, 2577–2580 (2006). https://doi.org/10.1007/s10853-006-7783-1

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  • DOI: https://doi.org/10.1007/s10853-006-7783-1

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