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Amperometric/potentiometric hydrocarbon sensors: real world solutions for use in ultra high vacuum

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Abstract

Carbonaceous deposits produced on Ru-capped multilayer mirrors under extreme ultra violet irradiation in the presence of adventitious gaseous hydrocarbons are a major obstacle to process implementation of EUV lithography. Here, by means of synchrotron radiation and laboratory measurements we show how carbon contamination occurs as a result of photoelectron-induced surface chemistry. We also demonstrate how a device based on an oxygen ion conducting solid electrolyte can act as a sensitive and reproducible sensor for detection of trace amounts of hydrocarbons in high vacuum environments.

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Acknowledgements

The authors acknowledge funding from BOC Edwards and the UK Engineering and Physical Sciences Research Council (EPSRC).

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Authors and Affiliations

  1. Chemistry Department, Cambridge University, Cambridge, CB2 1EW, UK

    Georgios Kyriakou, Amy V. Stevens, David J. Davis, Mintcho S. Tikhov & Richard M. Lambert

  2. Lithography Subsystems, BOC EDWARDS, Manor Royal, Crawley, West Sussex, UK

    Robert B. Grant

Authors
  1. Georgios Kyriakou
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  2. Amy V. Stevens
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  3. David J. Davis
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  4. Robert B. Grant
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  5. Mintcho S. Tikhov
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  6. Richard M. Lambert
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Corresponding author

Correspondence to Richard M. Lambert.

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Kyriakou, G., Stevens, A.V., Davis, D.J. et al. Amperometric/potentiometric hydrocarbon sensors: real world solutions for use in ultra high vacuum. J Appl Electrochem 38, 1089–1096 (2008). https://doi.org/10.1007/s10800-008-9568-5

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  • DOI: https://doi.org/10.1007/s10800-008-9568-5

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