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Recent Emission Channeling Studies in Wide Band Gap Semiconductors

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Abstract

We present results of recent emission channeling experiments on the lattice location of implanted Fe and rare earths in wurtzite GaN and ZnO. In both cases the majority of implanted atoms are found on substitutional cation sites. The root mean square displacements from the ideal substitutional Ga and Zn sites are given and the stability of the Fe and rare earth lattice location against thermal annealing is discussed.

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References

  1. Mohammad S. N. and Morkoç H., Prog. Quantum Electron. 20 (1996), 361.

    Article  Google Scholar 

  2. Pearton S. J., Zolper J. C., Shul R. J. and Ren F., J. Appl. Phys. 86 (1999), 1.

    Article  ADS  Google Scholar 

  3. Monroy E., Omnès F. and Calle F., Semicond. Sci. Technol. 18 (2003), R33.

    Article  ADS  Google Scholar 

  4. Pearton S. J., Ren F., Zhang A. P. and Lee K. P., Mater. Sci. Eng., R 30 (2000), 55.

    Article  Google Scholar 

  5. Kohl D., J. Phys., D, Appl. Phys. 34 (2001), R125.

    Article  ADS  Google Scholar 

  6. Pearton S. J., Kang B. S., Kim S., Ren F., Gila B. P., Abernathy C. R., Lin J. and Chu S. N. G., J. Phys., Condens. Matter 16 (2004), R961.

    Article  ADS  Google Scholar 

  7. Steckl A. J. and Zavada J. M., Mater. Res. Soc. Bull. 24 (1999), 23.

    Google Scholar 

  8. Pearton S. J., Abernathy C. R., Overberg M. E., Thaler G. T., Norton D. P., Theodoropoulou N., Hebard A. F., Park Y. D., Ren F., Kim J. and Boatner L. A., J. Appl. Phys. 93 (2003), 1.

    Article  ADS  Google Scholar 

  9. Favennec P. N., L'Haridon H., Moutonnet D., Salvi M. and Gauneau M., Mater. Res. Soc. Symp. Proc. 301 (1993), 181.

    Google Scholar 

  10. Dietl T., Semicond. Sci. Technol. 17 (2002), 377.

    Article  ADS  Google Scholar 

  11. Sato K. and Katayama-Yoshida H., Hyperfine Interact. 136 (2001), 737.

    Article  ADS  Google Scholar 

  12. Kucheyev S. O., Williams J. S., Jagadish C., Zou J., Evans C., Nelson A. J. and Hamza A. V., Phys. Rev., B 67 (2003), 094115.

    Article  Google Scholar 

  13. Bharuth-Ram K., Wahl U. and Correia J. G., Nucl. Instrum. Methods B 206 (2003), 941.

    Article  ADS  Google Scholar 

  14. Alves E., Correia R., Pereira S., Wahl U., De Vries B. and Vantomme A., Nucl. Instrum. Methods B 206 (2003), 1042.

    Article  ADS  Google Scholar 

  15. Vetter U., Reid M. F., Hofsäss H., Ronning C., Zenneck J., Dietrich M. and the ISOLDE Collaboration, Mater. Res. Soc. Symp. Proc. 743 (2003), L 6.16.

    Google Scholar 

  16. Vetter U., Hofsäss H., Wahl U., Dietrich M. and the ISOLDE Collaboration, Diamond and Related Materials 12 (2003), 1883.

    Article  Google Scholar 

  17. Vetter U., Taniguchi T., Wahl U., Correia J., Müller A., Ronning C., Hofsäss H., Dietrich M. and the ISOLDE Collaboration, Mater. Res. Soc. Symp. Proc. 744 (2003), M 8.38.

    Google Scholar 

  18. Stewart G. A., Materials Forum 18 (1994), 177.

    Google Scholar 

  19. Dalmer M., Vetter U., Restle M., Stötzler A., Hofsäss H., Ronning C., Moodley M. K., Bharuth-Ram K. and the ISOLDE Collaboration, Hyperfine Interact. 120 (1999), 347.

    Article  ADS  Google Scholar 

  20. Cadogan J. M. and Ryan D. H., Hyperfine Interact. 153 (2004), 25.

    Article  ADS  Google Scholar 

  21. Masterov V. F., Nasredinov F. S., Seregin P. P., Kudoyarova V. K., Kuznetsov A. N. and Terukov E. I., Appl. Phys. Lett. 72 (1998), 728.

    Article  ADS  Google Scholar 

  22. Rasera R. L. and Li-Scholz A., Phys. Rev., B 1 (1970), 1995.

    Article  ADS  Google Scholar 

  23. Thomé L., Bernas H., Abel F., Bruneaux M., Cohen C. and Chaumont J., Phys. Rev., B 14 (1976), 2787.

    Article  ADS  Google Scholar 

  24. Dogra R., Bhati A. K. and Bedi S. C., Hyperfine Interact. 108 (1997), 515.

    Article  ADS  Google Scholar 

  25. Vianden R., Hyperfine Interact. 35 (1987), 1079.

    Article  ADS  Google Scholar 

  26. Nédélec R., Vianden R. and the ISOLDE Collaboration, this conference, contr. C.7

  27. Schwalbach P., Laubach S., Hartick M., Kankeleit E., Keck B., Menningen M. and Sielemann R., Phys. Rev. Lett. 64 (1990), 1274.

    Article  ADS  Google Scholar 

  28. Langouche G., Hyperfine Interact. 72 (1992), 217.

    Article  ADS  Google Scholar 

  29. Weyer G. and the ISOLDE Collaboration, Hyperfine Interact. 129 (2000), 371.

    Article  ADS  Google Scholar 

  30. Bharuth-Ram K., Hyperfine Interact. 151 (2003), 21.

    Article  ADS  Google Scholar 

  31. Goya G. F., Stewart S. J. and Mercader R. C., Sol. State. Comm. 96 (1995), 485.

    Article  Google Scholar 

  32. Goya G. F. and Leite E. R., J. Phys., Condens. Matter 15 (2003), 641.

    Article  ADS  Google Scholar 

  33. Alves E., Liu C., Waerenborgh J. C., Da Silva M. F. and Soares J. C., Nucl. Instrum. Methods B 175 (2001), 241.

    Article  ADS  Google Scholar 

  34. Hofsäss H. and Lindner G., Phys. Rep. 210 (1991), 121.

    Article  ADS  Google Scholar 

  35. Hofsäss H., Wahl U. and Jahn S. G., Hyperfine Interact. 84 (1994), 27.

    Article  ADS  Google Scholar 

  36. Hofsäss H., Hyperfine Interact. 97 (1996), 247.

    Article  Google Scholar 

  37. Wahl U., Hyperfine Interact. 129 (2000), 349.

    Article  ADS  Google Scholar 

  38. Kugler E., Hyperfine Interact. 129 (2000), 23.

    Article  ADS  Google Scholar 

  39. Deicher M., Weyer G., Wichert T. and the ISOLDE Collaboration, Hyperfine Interact. 151 (2003), 105.

    Article  ADS  Google Scholar 

  40. Wahl U., Correia J. G., Czermak A., Jahn S. G., Jalocha P., Marques J. G., Rudge A., Schopper F., Vantomme A., Weilhammer P. and the ISOLDE Collaboration, Nucl. Instrum. Methods A 524 (2004), 245.

    Article  ADS  Google Scholar 

  41. Wahl U., Vantomme A., Langouche G., Araujo J. P., Peralta L., Correia G. and the ISOLDE Collaboration, J. Appl. Phys. 88 (2000), 1319.

    Article  ADS  Google Scholar 

  42. Wahl U., Vantomme A., Langouche G., Correia J. G., Peralta L. and the ISOLDE Collaboration, Appl. Phys. Lett. 78 (2001), 3217.

    Article  ADS  Google Scholar 

  43. Dalmer M., Restle M., Stötzler A., Vetter U., Hofsäss H., Bremser M. D., Ronning C. and Davies R. F., Mater. Res. Soc. Symp. Proc. 482 (1998), 1021.

    Google Scholar 

  44. Wahl U., Alves E., Lorenz K., Correia J. G., Monteiro T., De Vries B., Vantomme A. and Vianden R., Mater. Sci. Eng., B 105 (2003), 132.

    Article  Google Scholar 

  45. De Vries B., Wahl U., Vantomme A., Correia J. G. and the ISOLDE Collaboration, Mater. Sci. Eng., B 105 (2003), 106.

    Article  Google Scholar 

  46. De Vries B., Wahl U., Vantomme A., Correia J. G. and the ISOLDE Collaboration, Phys. Status Solidi (c) 0 (2002), 453.

    Google Scholar 

  47. De Vries B., Matias V., Vantomme A., Wahl U., Rita E. M. C., Alves E., Lopes A. M. L., Correia J. G. and the ISOLDE Collaboration, Appl. Phys. Lett. 84 (2004), 4304.

    Article  ADS  Google Scholar 

  48. Torvik J. T., Qiu C. H., Feuerstein R. J., Pankove J. I. and Namavar F., J. Appl. Phys. 81 (1997), 6343.

    Article  ADS  Google Scholar 

  49. Wahl U., Vantomme A., De Wachter J., Moons R., Langouche G., Marques J. G., Correia J. G. and the ISOLDE Collaboration, Phys. Rev. Lett. 79 (1997), 2069.

    Article  ADS  Google Scholar 

  50. Wahl U., Rita E., Alves E., Correia J. G., Araújo J. P. and the ISOLDE collaboration, Appl. Phys. Lett. 82 (2003), 1173.

    Article  ADS  Google Scholar 

  51. Rita E. M. C., Wahl U., Lopes A. L., Araújo J. P., Correia J. G., Alves E., Soares J. C. and the ISOLDE Collaboration, Mater. Res. Soc. Symp. Proc. 774 (2003), M 3.7.

    Google Scholar 

  52. Alves E., Rita E., Wahl U., Correia J. G., Monteiro T. and Boemare C., Nucl. Instrum. Methods B 206 (2003), 1047.

    Article  ADS  Google Scholar 

  53. Braud A., Doualan J. L., Moncorge R., Pipeleers B. and Vantomme A., Mater. Sci. Eng., B 105 (2003), 101.

    Article  Google Scholar 

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Authors and Affiliations

  1. Instituto Tecnológico e Nuclear, Department Física, Estrada Nacional 10, 2686-953, Sacavém, Portugal

    U. Wahl, J. G. Correia, E. Rita & E. Alves

  2. Centro de Física Nuclear da Universidade de Lisboa, 1649-003, Lisbon, Portugal

    U. Wahl, J. G. Correia, E. Rita, E. Alves & J. C. Soares

  3. CERN-PH, 1211, Geneva 23, Switzerland

    J. G. Correia

  4. Instituut voor Kern- en Stralingsfysica, 3001, Leuven, Belgium

    B. De Vries, V. Matias & A. Vantomme

Authors
  1. U. Wahl
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  2. J. G. Correia
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  3. E. Rita
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  4. E. Alves
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  5. J. C. Soares
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  6. B. De Vries
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  7. V. Matias
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  8. A. Vantomme
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Correspondence to U. Wahl.

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Wahl, U., Correia, J.G., Rita, E. et al. Recent Emission Channeling Studies in Wide Band Gap Semiconductors. Hyperfine Interact 159, 363–372 (2004). https://doi.org/10.1007/s10751-005-9125-0

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