Abstract
This article presents a new design of a silicon-based microcalorimeter made with dual thermopiles and a microchannel. The dual thermopile was fabricated with chromium and copper using a microelectromechanical system (MEMS) technique, and the microchannel was made of PDMS using soft-lithography. Each thermopile consists of 26 thermocouple pairs and 50 μm wide electrodes. The total sensitivity of thermopile is 428 μV/K. The dual thermopile system enables the microcalorimeter to acquire reliable data in a rapid and convenient manner because it detects the reaction and reference temperatures simultaneously. This self-compensation allows our device to analyze a few microliters of sample solution without the need for a surrounding adiabatic vacuum.
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Acknowledgments
This work was supported by Basic Research Program of the Korea Science & Engineering Foundation (Grant no. R01-2005-000-10160-0(2006)), ICBIN of Seoul R&BD program (Grant no. 10816), and National Core Research Center for Nanomedical Technology of the Korea Science & Engineering Foundation (Grant no. R15-2004-024-01001-0).
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Kwak, B.S., Kim, B.S., Cho, H.H. et al. Dual thermopile integrated microfluidic calorimeter for biochemical thermodynamics. Microfluid Nanofluid 5, 255–262 (2008). https://doi.org/10.1007/s10404-007-0243-7
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DOI: https://doi.org/10.1007/s10404-007-0243-7