Tapered microvalves fabricated by off-axis X-ray exposures

Abstract

 A method for creating angled structures for use in microvalve devices applicable to control of liquid flow is presented. This technique utilizes a modified LIGA process with successive angled and rotated exposures into free standing acrylic sheets to form a tapered valve seat structure. These valve seats are integrated with bulk micromachined silicon diaphragms and tapered PMMA valve bosses to complete the microvalve. The long term goal of this research effort is to develop a normally-closed, low power, microfabricated valve for use in an implantable drug delivery system. This paper reports on the design and fabrication of microvalves using off-axis LIGA exposures. Flow testing and fluid handling characterization results are also presented.