Abstract
This paper presents a two-DOF actuator module for weight device manipulations. Minimum requirements for a two-DOF actuator module are high accurate positioning, long stroke motion, and fully motion decoupling to utilize standalone stage. Also, the shape and compactness should be considered to utilize for kinematic linkage of the parallel manipulator. In order to achieve minimum requirements, we proposed the fully decoupled parallel structure that is a kind of the motion converting mechanism consisting of reduction unit, decoupling unit, primary motion unit, and secondary motion unit. Moreover, we utilized conventional mechanical components to assemble mechanical units. The conventional mechanical components commonly involve undesired motions such as straightness error, flatness error, angular runout, and backlash. To minimize the undesired motion, we design the final prototype of actuator module by considering preload and paired joint in all of the motion components. Finally, to validate system performance, we performed several experimental tests, namely, positioning accuracy, closed-loop control response, and axis selection. The results show root mean square error 45 nm and standard deviation 44 nm.
Similar content being viewed by others
References
Arai F, Sugiyama T, Luangjarmekorn P, Kawaji A, Fukuda T, Itoigawa K, Maeda A (1999) 3D bio-micromanipulation (bilateral control system using micro tri-axial force sensor). In: Micromechatronics and human science, 1999. MHS ’99. Proceedings of 1999 international symposium on, pp 71–77
Binnig G, Rohrer H, Gerber C, Weibel E (1982) Surface studies by scanning tunneling microscopy. Phys Rev Lett 49:57–61
Dong J, Ferreira P (2009) Electrostatically actuated cantilever with SOI-MEMS parallel kinematic stage. J Microelectromechanical Syst 18(3):641–651
Dong L, Subramanian A, Nelson BJ (2007) Carbon nanotubes for nanorobotics. Nano Today 2(6):12–21
Dong L, Arai F, Fukuda T (2000) 3D nanorobotic manipulation of nano-order objects inside SEM. In: Micromechatronics and human science, 2000. MHS 2000. Proceedings of 2000 international symposium on, pp 151–156
Ihn YS, Ji S-H, Moon H, Choi HR, Koo JC (2012) A dual step precision multi-dof stage for maskless digital lithography. Microsyst Technol 18(9–10):1741–1750
Ihn YS, Ji S-H, Moon H, Choi HR, Koo JC (2014) Kinematic design of a redundant parallel mechanism for maskless lithography optical instrument manipulations. Microsyst Technol 20(8–9):1479–1490
Ihn YS, Moon H, Choi HR, Koo JC (2012) Design and implementation of a 2-dof decoupled kinematic actuator module. In: Intelligent robots and systems, 2012. IROS 2012. IEEE/RSJ international conference on, pp 2533–2538 (2012)
Ihn YS, Ryu S, Choi B, Ha S, Choi H, Lee S, Koo J (2007) An enhanced vision processing algorithm for a micro-manipulation system. In: Robotic and sensors environments, 2007. ROSE 2007. International workshop on, pp 1–6
Ihn YS, Kim Y, Choi H, Lee S, Koo J (2009) Implementation of graspless handling system for microparticles using AFM probe. In: Intelligent robots and systems, 2009. IROS 2009. IEEE/RSJ international conference on, pp 1843–1848
Ji L, Zhu Y, Moheimani S, Yuce M (2010) A micromachined 2DOF nanopositioner with integrated capacitive displacement sensor. In: Sensors, 2010 IEEE, pp 1464–1467
Kim W, Trumper D (1998) High-precision magnetic levitation stage for photolithography. Precis Eng J Int Soc Precis Eng Nanotechnol 22(2):66–77
Kim W, Trumper D (1997) Active multivariable optimal control of a planar magnetic levitator. In: Control applications, 1997, Proceedings of the 1997 IEEE international conference on, pp 97–102
Lai L, Gu G-Y, Li P, Zhu L (2011) Design of a decoupled 2-DOF translational parallel micro-positioning stage. In: Robotics and automation (ICRA), 2011 IEEE international conference on, pp 5070–5075
Li Y, Xu Q (2006) A novel design and analysis of a 2-DOF compliant parallel micromanipulator for nanomanipulation. IEEE Trans Autom Sci Eng 3(3):247–254
Li Y, Xu Q (2009) Design and analysis of a totally decoupled flexure-based XY parallel micromanipulator. IEEE Trans Robot 25(3):645–657
Li Y, Xu Q (2009) Modeling and performance evaluation of a flexure-based XY parallel micromanipulator. Mech Mach Theory 44(12):2127–2152
Li Y, Xu Q (2011) A totally decoupled piezo-driven XYZ flexure parallel micropositioning stage for micro/nanomanipulation. IEEE Trans Autom Sci Eng 8(2):265–279
Li Y, Xu Q (2008) Design of a new decoupled XY flexure parallel kinematic manipulator with actuator isolation. In: Intelligent robots and systems, 2008. IROS 2008. IEEE/RSJ international conference on, pp 470–475
Li B, Zhao X, Meng G (2010) Kinematics analysis of a novel over-constrained parallel manipulator. In: 2010 IEEE international conference on robotics and biomimetics, ROBIO 2010, pp 489–494
Morgan B, McGee J, Ghodssi R (2007) Automated two-axes optical fiber alignment using grayscale technology. J Microelectromechanical Syst 16(1):102–110
Park G, Kim C, Park K (2006) Analysis and control of 2-DOF magnetic levitation stage using force decoupling theorem. SICE-ICASE, 2006. international joint conference, pp 1091–1095
Pham H-H, Chen I-M (2004) Evaluation of resolution of flexure parallel mechanisms for ultraprecision manipulation. Rev Sci Instrum 75(9):3016–3024
Ru C, Zhang Y, Sun Y, Zhong Y, Sun X, Hoyle D, Cotton I (2011) Automated four-point probe measurement of nanowires inside a scanning electron microscope. IEEE Trans Nanotechnol 10(4):674–681
Ryu J, Kim S, Kim S (1997) A criterion on inclusion of stress stiffening effects in flexible multibody dynamic system simulation. Comput Struct 62(6):1035–1048
Verma S, Jong Kim W, Gu J (2004) Six-axis nanopositioning device with precision magnetic levitation technology. IEEE/ASME Trans Mechatron 9(2):384–391
Verma S, Jong Kim W, Shakir H (2005) Multi-axis maglev nanopositioner for precision manufacturing and manipulation applications. IEEE Trans Ind Appl 41(5):1159–1167
Verma S, Shakir H, Kim W (2006) Novel electromagnetic actuation scheme for multiaxis nanopositioning. IEEE Trans Magn 42(8):2052–2062
Wang W, Han C, Choi H (2011) 2-DOF kinematic XY stage design based on flexure element. Mechatronics and automation (ICMA), 2011 International conference on, pp 1412–1417
Yao Q, Dong J, Ferreira PM (2008) A novel parallel-kinematics mechanisms for integrated, multi-axis nanopositioning, Part 1. Kinematics and design for fabrication. Precis Eng J Int Soc Precis Eng Nanotechnol 32(1):7–19
Acknowledgments
This work was supported by the Global Frontier R&D Program on Human-centered Interaction for Coexistence funded by the National Research Foundation of Korea Grant funded by the Korean Government(MSIP) (NRF-M1AXA003-2010-0029748) and the convergence technology development program for bionic arm through the National Research Foundation of Korea(NRF) funded by the Ministry of Science, ICT & Future Planning (No. 2014M3C1B2048419).
Author information
Authors and Affiliations
Corresponding author
Additional information
Parts of this paper were presented at the 2012 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2012), Vilamoura-Algarve, Portugal, October, 2012.
Rights and permissions
About this article
Cite this article
Ihn, Y.S. Two-DOF actuator module design and development based on fully decoupled parallel structure. Microsyst Technol 24, 1359–1368 (2018). https://doi.org/10.1007/s00542-016-3018-9
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00542-016-3018-9