Abstract
This paper presents the design and fabrication of a silicon micro gearing system (MGS) that utilizes electrostatic comb-drive actuators to rotate a gear ring through a ratchet mechanism. The rotational comb-drive actuator is engaged with the gear ring through a spring system and ratchet teeth at one end, reciprocally rotates around an elastic point at the other end based on the electrostatic force. Rotational motion and torque from the driving gear ring are transmitted smoothly to driven gears through involute-shaped gear teeth. Smart design of anti-gap structures helps to overcome the unavoidable gap problem occurred in deep reactive ion etching (deep-RIE) process of silicon. The MGS has been fabricated and tested successfully by using SOI (silicon-on-insulator) wafer and one mask only. The angular velocity of the gear ring is proportional to the driving frequency up to 40 Hz.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Allen JJ, Schriner HK (1998) Micromachine wedge stepping motor. In: ASME International Mechanical Engineering Congress and Expositions—MEMS Symposia, Anaheim, CA, 20 Nov 1998
Barnes SM, Miller SL, Rodgers MS, Bitsie F (2000) Torsional ratcheting actuating system. In: Symposium on Modeling and Simulation of Microsystems, San Diego, CA (US), p 4, 27–29 Mar 2000
Dao VD, Pham HP, Sugiyama S (2010) A novel micro transportation system with fast movement of a micro container based on electrostatic actuation and a ratchet mechanism. J Micromech Microeng 20(11)
Dao VD, Pham HP, Sugiyama S (2011) Multimodule micro transportation system based on electrostatic comb-drive actuator and ratchet mechanism. J Microelectromech Syst 20(1):140–149
Garcia EI, Sniegowski JJ (1995) Surface micromachined microengine as the driver for micromechanical gears. Transducers’95, Stockholm, pp 365–368
Hwang IH, Lee YG, Lee JH (2006) A micromachined friction meter for silicon sidewalls with consideration of contact surface shape. J Micromech Microeng 16(11):2475–2481
Kim SC, Kim SH (1999) Precise rotary motor by inchworm motion using dual wrap belt. Rev Sci Instrum 70(5):2546–2550
Noguchi K, Fujita H, Suzuki M (1991) The measurement of friction on micromechatronics elements. In: Tech. Dig. 14th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS-1991), Interlaken, Switzerland, pp 148–153
Pham HP, Dao VD, Amaya S, Kitada R, Sugiyama S (2006) Straight movement of micro containers based on ratchet mechanism and electrostatic comb-drive actuators. J Micromech Microeng 16(12):2532–2538
Pham HP, Dao VD, Sugiyama S (2007) Micro transprotation system (MTS) with large movement of containers driven by electrostatic comb-drive actuators. J Micromech Microeng 17(10):2125–2131
Sniegowski JJ, Garcia EI (1996) Surface-micromachined gear trains driven by an on-chip electrostatic microengine. IEEE Electron Device Lett 17(7):366–368
Tanner DM et al (2001) Reliability of a MEMS Torsional Ratcheting Actuator. In: IEEE—39th Annual international Reliability Physics Symposium, Orlando, Florida (US), pp 81–90
Acknowledgments
The authors gratefully acknowledge to the National Potential Project Program of Vietnam for funding (Code: KC.03.TN01/11-15).
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Pham, P.H., Dao, D.V. A micro gearing system based on a ratchet mechanism and electrostatic actuation. Microsyst Technol 19, 261–267 (2013). https://doi.org/10.1007/s00542-012-1625-7
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00542-012-1625-7