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Multilayer high-aspect-ratio RF coil for NMR applications

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Abstract

Microcoils offer a high degree of mass sensitivity and high magnetic field gradient strength in magnetic resonance microscopy applications. This paper presents a novel multilayer high-aspect-ratio metal fabrication process that can be used to fabricate a nanoliter-volume radio frequency (RF) saddle coil with an embedded flow-through fluidic channel for nuclear magnetic resonance (NMR) applications. The fabrication process is based on repeated electroplating processes and structure release processes. The achieved aspect ratio of the developed RF saddle coil is 4 with a structure line width of 25 μm. The resistance of the RF coil and the 1H spectrum line width have been measured and are found to be 0.7 Ω and 350 Hz, respectively. Our results indicate that this novel fabrication process for RF microcoils is feasible for NMR applications.

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References

  • Badilita V, Kratt K, Baxan N, Mohmmadzadeh M, Burger T, Weber H, von Elverfeldt D, Hennig J, Korvink JG, Wallrabe U (2010) On-chip three dimensional microcoils for MRI at the microscale. Lab Chip 10:1387–1390

    Article  Google Scholar 

  • Bu M, Melvin T, Ensell GJ, Wilkinson JS, Evans AGR (2004) A new masking technology for deep glass etching and its microfluidic application. Sens Actuators A Phys 115:476–482

    Article  Google Scholar 

  • Demas V, Herberg JL, Malba V, Bernhardt A, Evans L, Harvey C, Chinn SC, Maxwell RS, Reimer J (2007) Portable, low-cost NMR with laser-lathe lithography produced microcoils. J Magn Reson 189:121–129

    Article  Google Scholar 

  • Ehrmann K, Saillen N, Vincent F, Stettler M, Jordan M, Wurm FM, Besse P-A, Popovic R (2007) Microfabricated solenoids and Helmholtz coils for NMR spectroscopy of mammalian cells. Lab Chip 7:373–380

    Article  Google Scholar 

  • Ginsberg DM, Melchner MJ (1970) Optimum geometry of saddle shaped coils for generating a uniform magnetic field. Rev Sci Instrum 41:122–123

    Article  Google Scholar 

  • Goto S, Matsunaga T, Matsuoka Y, Kuroda K, Esashi M, Haga Y (2007) Development of high-resolution intraluminal and intravascular MRI probe using microfabrication on cylindrical substrates. In: IEEE MEMS 2007, Kobe, Japan, 21–25 January 2007, pp 329–332

  • Iliescu C, Jing J, Tay FEH, Miao J, Sun T (2005) Characterization of masking layers for deep wet etching of glass in an improved HF/HCl solution. Surf Coat Technol 198:314–318

    Article  Google Scholar 

  • Jackman RJ, Brittain ST, Whitesides GM (1998) Fabrication of three-dimensional microstructures by electrochemically welding structures formed by microcontact printing on planar and curved substrates. J Microelectromech Syst 7:261–266

    Article  Google Scholar 

  • Jiang YG, Ono T, Esashi M (2006) High aspect ratio spiral microcoils fabricated by a silicon lost molding technique. J Micromech Microeng 16:1057–1061

    Article  Google Scholar 

  • Kim Y, Llamas-Garro I, Baek CW, Kim JM, Kim YK (2009) New release technique of a thick sacrificial layer and residue effects on novel half-coaxial transmission line filters. J Micromech Microeng 19:1–6

    Google Scholar 

  • Lacey ME, Subramanian R, Olson DL, Webb AG, Sweedler JV (1999) High-resolution NMR spectroscopy of sample volumes from 1 nL to 10 μL. Chem Rev 99(10):3133–3152

    Article  Google Scholar 

  • Lam MHC, Homenuke MA, Michael CA, Hansen CL (2009) Sub-nanoliter nuclear magnetic resonance coils fabricated with multilayer soft lithography. J Micromech Microeng. doi:10.1088/0960-1317/19/9/095001

  • Li Y, Ahmad MM, Hand JW, Syms RRA, Gilderdale D, Collins DJ, Young IR (2007) Microcoils on structured silicon substrates for magnetic resonance detection. IEEE Sens J 7(9):1362–1369

    Article  Google Scholar 

  • Malba V, Maxwell R, Evans LB, Bernhardt AF, Cosman M, Yan K (2003) Laser-lathe lithography—a novel method for manufacturing nuclear magnetic resonance microcoils. Biomed Microdevices 5(1):21–27

    Article  Google Scholar 

  • Massin C, Vincent F, Homsy A, Ehrmann K, Boero G, Besse P-A, Daridon A, Verpoorte E, de Rooij NF, Popovic RS (2003) Planar microcoil-based microfluidic NMR probes. J Magn Reson 164:242–255

    Article  Google Scholar 

  • Olson DL, Peck TL, Webb AG, Magin RL, Sweedler JV (1995) High-resolution microcoil 1H-NMR for mass-limited, nanoliter-volume samples. Science 270:1967

    Article  Google Scholar 

  • Olson DL, Lacey ME, Sweedler JV (1998) High-resolution microcoil NMR for analysis of mass-limited, nanoliter samples. Anal Chem 70:645–650

    Article  Google Scholar 

  • Seeber DA, Hoftiezer JH, Daniel WB, Rutgers MA, Pennington CH (2000) Triaxial magnetic field gradient system for microcoil magnetic resonance imaging. Rev Sci Instrum 71:4263–4272

    Article  Google Scholar 

  • Song JS, Lee S, Jung SH, Cha GC, Mun MS (2009) Improved biocompatibility of parylene-C files prepared by chemical vapor deposition and the subsequent plasma treatment. J Appl Polym Sci 112:3677–3685

    Article  Google Scholar 

  • Woytasik M, Ginefri JC, Raynaud JS, Poirier-Quinot M, Dufour-Gergam E, Grandchamp J, Girard O, Robert P, Gilles JP, Martincic E, Darrasse L (2007) Characterization of flexible RF microcoils dedicated to local MRI. Microsyst Technol 13:1575–1580

    Article  Google Scholar 

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Acknowledgments

The authors wish to thank Prof. F.N. Wang and Dr. C.S. Chen for their valuable inputs, Force Design Inc. for the customized jigs, and Ms. S.C. Sung for the schematic drawings.

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Authors and Affiliations

  1. Institute of NEMS, National Tsing Hua University, Hsinchu, Taiwan

    C. Y. Hsieh, Y. T. Yeh & L. S. Fan

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  1. C. Y. Hsieh
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  2. Y. T. Yeh
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  3. L. S. Fan
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Correspondence to C. Y. Hsieh.

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Hsieh, C.Y., Yeh, Y.T. & Fan, L.S. Multilayer high-aspect-ratio RF coil for NMR applications. Microsyst Technol 17, 1311–1317 (2011). https://doi.org/10.1007/s00542-011-1305-z

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  • DOI: https://doi.org/10.1007/s00542-011-1305-z

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