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Research development of measuring methods on the tribology characters for movable MEMS devices: a review

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Abstract

Micro electro-mechanical systems (MEMS) offers great promise for system integration of sensors, actuators and signal processing. However, to the movable MEMS devices, there have always been major obstacles to their realization and reliability in the past—tribology problems. Because of the size effect, the conventional frictional law is no longer feasible to MEMS devices. It is vital to do research on micro-tribology and rebuild a micro-tribology theory in which size effect must be concerned. At the same time, in order to obtain reliable experimental data to support the theory, a feasible measuring method is also necessary. This paper describes two kinds of measuring methods to realize this purpose—on-chip measuring method and off-chip measuring method. Advantages, disadvantages, research status and the application prospect of each kind of methods are all introduced. Finally, development prospect of measuring methods is mentioned.

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Acknowledgments

This study is supported by the Aviation Research Foundation with grant No: 2007ZD51050 and the National 863 Research Program of China with grant No:2006AA04Z364.

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Authors and Affiliations

  1. School of Instrument Science and Opto-electronics Engineering, BeiHang University, 100083, Beijing, China

    Zhanshe Guo, Zhou Feng, Shangchun Fan, Dezhi Zheng & Haihan Zhuang

  2. Key Laboratory of Precision Opto-mechatronics Techonology, Ministry of Education, 100083, Beijing, China

    Zhanshe Guo, Zhou Feng, Shangchun Fan, Dezhi Zheng & Haihan Zhuang

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  1. Zhanshe Guo
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  2. Zhou Feng
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  3. Shangchun Fan
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Correspondence to Zhanshe Guo.

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Guo, Z., Feng, Z., Fan, S. et al. Research development of measuring methods on the tribology characters for movable MEMS devices: a review. Microsyst Technol 15, 343–354 (2009). https://doi.org/10.1007/s00542-008-0719-8

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  • DOI: https://doi.org/10.1007/s00542-008-0719-8

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