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A novel x-axis tuning fork gyroscope with “8 vertical springs-proofmass” structure on (111) silicon

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Abstract

A novel x-axis tuning fork gyroscope with “8 vertical springs-proofmass” structure is presented. Wafer-thick proofmasses are made out of (111) silicon with bulk micromachining processes to achieve lower thermo-mechanical noise. Each proofmass is supported by 8 vertical springs, which are symmetrically distributed around the proofmass. The dimensions of 8 vertical springs are precisely confined by thermal oxide protected sidewalls and the extreme slowly etched (111)-planes in KOH etching. A mode mismatch of less than 30 Hz is achieved before tuning. Initial test shows a sensitivity of 0.15 mV/(deg/s) and a rate resolution around 0.1 deg/s under atmosphere pressure.

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Acknowledgments

This research is supported by the National High Technology Research and Development Program of China (863 Program) under Grant no.2006AA04Z312. This support is gratefully acknowledged.

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Authors and Affiliations

  1. State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China

    Fei Duan, Jiwei Jiao, Yucai Wang, Ying Zhang, Binwei Mi, Jinpeng Li & Yuelin Wang

  2. Graduate school of the Chinese Academy of Sciences, Beijing, 100039, China

    Fei Duan, Yucai Wang & Jinpeng Li

Authors
  1. Fei Duan
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  2. Jiwei Jiao
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  3. Yucai Wang
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  4. Ying Zhang
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  5. Binwei Mi
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  6. Jinpeng Li
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  7. Yuelin Wang
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Correspondence to Jiwei Jiao.

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Duan, F., Jiao, J., Wang, Y. et al. A novel x-axis tuning fork gyroscope with “8 vertical springs-proofmass” structure on (111) silicon. Microsyst Technol 14, 1009–1013 (2008). https://doi.org/10.1007/s00542-007-0527-6

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  • DOI: https://doi.org/10.1007/s00542-007-0527-6

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