1 Erratum to: Microsyst Technol DOI 10.1007/s00542-006-0174-3
Unfortunately, the author Kyunghwan Kim was omitted in the original version of this article. His name and affiliation are shown here.
K. Kim
Department of Electric and Information Engineering, Kyungwon University, Seongnam, South Korea
Author information
Authors and Affiliations
Corresponding author
Additional information
The online version of the original article can be found at http://dx.doi.org/10.1007/s00542-006-0174-3.
Rights and permissions
About this article
Cite this article
Lu, H., Pillans, B., Lee, JC. et al. High aspect ratio air core solenoid inductors using an improved UV-LIGA process with contrast enhancement material. Microsyst Technol 13, 409 (2007). https://doi.org/10.1007/s00542-006-0248-2
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00542-006-0248-2