Skip to main content
Log in

Rapid fabrication and trimming of nanostructured backside reflectors for enhanced optical absorption in a-Si:H solar cells

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

Nanostructured metallic backside reflectors (BSRs) are crucial for enhanced optical absorption in thin-film amorphous silicon solar cells. The structural fabrication based on rapid aluminum (Al) anodization has a potential for roll-to-roll processes, which are promising for low-cost and large-scale fabrication of BSRs. In this regard, the short fabrication time via appropriate choice of acid, acid concentration, temperature, and time-dependent voltage control is very important. In addition, we first demonstrate the trimming of structural height by using conventional Al anodization, so the best pore size of BSRs with the same structural height can be determined. According to integrated external quantum efficiency (IEQE) calculations, the nanostructured BSR with 430-nm pore size shows 51.6 % IEQE improvement compared with the value of the flat BSR. Moreover, it is interesting that the absorption spectra of a-Si:H on nanostructured Al BSRs with and without the 100-nm Ag coating are highly similar even if the optical properties of Al and Ag are different.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8

Similar content being viewed by others

References

  1. J. Meier, S. Dubail, R. Platz, P. Torres, U. Kroll, J.A. AnnaSelvan, N. PellatonVaucher, C. Hof, D. Fischer, H. Keppner, R. Flückiger, A. Shah, V. Shklover, K.-D. Ufert, Sol. Energy Mater. Sol. Cells 49, 35–44 (1997)

    Article  Google Scholar 

  2. T. Su, P.C. Taylor, G. Ganguly, D.E. Carlson, Phys. Rev. Lett. 89, 015502 (2002)

    Article  ADS  Google Scholar 

  3. B. Rech, H. Wagner, Appl. Phys. A Mater. Sci. Process. 69, 155–167 (1999)

    Article  ADS  Google Scholar 

  4. H. Sai, H. Fujiwara, M. Kondo, Y. Kanamori, Appl. Phys. Lett. 93, 143501 (2008)

    Article  ADS  Google Scholar 

  5. H. Huang, L. Lu, J. Wang, J. Yang, S.-F. Leung, Y. Wang, D. Chen, X. Chen, G. Shen, D. Li, Z. Fan, Energy Environ. Sci. 6, 2965–2971 (2013)

    Article  Google Scholar 

  6. Y.-C. Tsao, C. Fisker, T.G. Pedersen, Opt. Commun. 315, 17 (2014)

    Article  ADS  Google Scholar 

  7. Y.-C. Tsao, C. Fisker, T.G. Pedersen, Opt. Express 22, A651 (2014)

    Article  ADS  Google Scholar 

  8. C. Battaglia, C.-M. Hsu, K. Söderström, J. Escarré, F.-J. Haug, M. Charrière, M. Boccard, M. Despeisse, D.T.L. Alexander, M. Cantoni, Y. Cui, C. Ballif, ACS Nano 6, 2790–2797 (2012)

    Article  Google Scholar 

  9. M.H. Lee, N. Lim, D.J. Ruebusch, A. Jamshidi, R. Kapadia, R. Lee, T.J. Seok, K. Takei, K.Y. Cho, Z. Fan, H. Jang, M. Wu, G. Cho, A. Javey, Nano Lett. 11, 3425–3430 (2011)

    Article  Google Scholar 

  10. W. Lee, R. Ji, U. Gösele, K. Nielsch, Nat. Mater. 5, 741–747 (2006)

    Article  ADS  Google Scholar 

  11. Y. Li, M. Zheng, L. Ma, W. Shen, Nanotechnology 17, 5101–5105 (2006)

    Article  ADS  Google Scholar 

  12. Q. Wang, Y. Long, B. Sun, J. Porous Mater. 20, 785–788 (2013)

    Article  Google Scholar 

  13. A.S. Lin, Y.-K. Zhong, S.-M. Fu, C.-W. Tseng, S.-Y. Lai, W.-M. Lai, J. Opt. 15, 105007 (2013)

    Article  ADS  Google Scholar 

  14. A. Lin, J.D. Phillips, Sol. Energy Mater. Sol. Cells 92, 1689–1696 (2008)

    Article  Google Scholar 

  15. L. Yuan, F. Chen, C. Zheng, J. Liu, N. Alemu, Phys. Status Solidi A 209, 1376–1379 (2012)

    Article  ADS  Google Scholar 

  16. J. Bellemare, F. Sirois, D. Enard, J. Electrochem. Soc. 161, E75–E80 (2014)

    Article  Google Scholar 

  17. V.P. Parkhutik, V.I. Shershulsky, J. Phys. D Appl. Phys. 25, 1258 (1992)

    Article  ADS  Google Scholar 

  18. S. Ono, M. Saito, M. Ishiguro, H. Asoh, J. Electrochem. Soc. 151, B473–B478 (2004)

    Article  Google Scholar 

  19. S.Z. Chu, K. Wada, S. Inoue, M. Isogai, Y. Katsuta, A. Yasumori, J. Electrochem. Soc. 153, B384–B391 (2006)

    Article  Google Scholar 

  20. H. Ehrenreich, H.R. Philipp, B. Segall, Phys. Rev. 132, 1918–1928 (1963)

    Article  ADS  Google Scholar 

  21. Y.-C. Tsao, T. Søndergaard, E. Skovsen, L. Gurevich, K. Pedersen, T.G. Pedersen, Opt. Express 21, A84 (2013)

    Article  ADS  Google Scholar 

  22. Lumerical FDTD Solutions. http://www.lumerical.com/tcad-products/fdtd/

  23. ASTM standard tables for reference solar spectral irradiances: direct normal and hemispherical on 37° tilted surface. Standard No. G173-03.West Conshohocken (PA): American Society for Testing and Materials. http://www.astm.org, (2003)

  24. H. Sai, T. Koida, T. Matsui, I. Yoshida, K. Saito, M. Kondo, Appl. Phys. Express 6, 104101 (2013)

    Article  ADS  Google Scholar 

  25. J. Müllera, B. Rech, J. Springer, M. Vanecek, Sol. Energy 77, 917–930 (2004)

    Article  ADS  Google Scholar 

  26. F.-J. Haug, T. Söderström, O. Cubero, V. Terrazzoni-Daudrix, C. Ballif, J. Appl. Phys. 106, 044502 (2009)

    Article  ADS  Google Scholar 

Download references

Acknowledgments

The authors acknowledge the assistance of M. Bellettato for solar cell fabrication at IMM CNR-Bologna, Italy, the technical support of D. Wang at Department of Physics and Nanotechnology, Aalborg University, Denmark, and the support by the QUSCOPE center from the Villum foundation. This work was supported by the Danish strategic research council under the project named thin-film solar cell based on nanocrystalline silicon and structured backside reflectors—THINC.

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Yao-Chung Tsao.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Tsao, YC., Søndergaard, T., Kristensen, P.K. et al. Rapid fabrication and trimming of nanostructured backside reflectors for enhanced optical absorption in a-Si:H solar cells. Appl. Phys. A 120, 417–425 (2015). https://doi.org/10.1007/s00339-015-9205-1

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-015-9205-1

Keywords

Navigation