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Fabrication of desired three-dimensional structures by holographic assembly technique

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Abstract

We demonstrate a novel technique to fabricate desired three-dimensional (3D) periodic structures by holographically assembling multiple one-dimensional (1D) or multiple two-dimensional (2D) structures. Thanks to the high-absorption effect of the used material, we fabricated for each time, by employing a two-beam interference technique, a 1D or a 2D structure with very limited film thickness. By using the same sample and repeating the same fabrication process, i.e., (i) spin coating, (ii) exposure, and (iii) post-exposure bake, we created, layer-by-layer, a 3D structure as desired, without the limitation of the number of layers. This technique allows rapid fabrication of very large and thick 3D photonic crystal template with variable period, flexible design, low cost, and possible introduction of arbitrary defects inside a 3D structure.

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Authors and Affiliations

  1. Laboratoire de Photonique Quantique et Moléculaire, Ecole Normale Supérieure de Cachan, UMR CNRS 8537, Cachan, France

    Ngoc Diep Lai

  2. Department of Physics, National Chung Cheng University, Ming Hsiung, Chiayi, 621, Taiwan

    Tsao Shih Zheng, Danh Bich Do, Jian Hung Lin & Chia Chen Hsu

  3. Department of Physics, Hanoi National University of Education, 136 Xuan Thuy, Hanoi, Vietnam

    Danh Bich Do

  4. Graduate Institute of Opto-Mechatronics, National Chung Cheng University, Ming Hsiung, Chiayi, 621, Taiwan

    Chia Chen Hsu

  5. Department of Photonics, National Sun Yat-Sen University, Kaohsiung, 804, Taiwan

    Chia Chen Hsu

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  1. Ngoc Diep Lai
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  2. Tsao Shih Zheng
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  3. Danh Bich Do
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  4. Jian Hung Lin
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  5. Chia Chen Hsu
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Correspondence to Ngoc Diep Lai.

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Lai, N.D., Zheng, T.S., Do, D.B. et al. Fabrication of desired three-dimensional structures by holographic assembly technique. Appl. Phys. A 100, 171–175 (2010). https://doi.org/10.1007/s00339-010-5720-2

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  • DOI: https://doi.org/10.1007/s00339-010-5720-2

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