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Focused ion beam milling for prototyping 2D and 3D photonic structures

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Abstract

Focused ion beam (FIB) milling is widely used in fields such as the semiconductor industry and materials science research. The direct writing and small feature size also make FIB milling attractive for rapid prototyping of novel photonic structures. In this manuscript, we describe in detail a FIB milling procedure which enables high-resolution fabrication of complex micro- and nanostructures with precise geometry control. Two different procedures (for 2D and 3D structures) are described and implemented on the tip of a glass optical fiber for fabricating diverse structures embedded on or below the tip surface. The procedures described here can be easily adjusted and implemented on any conductive or non-conductive substrate.

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Author notes

  1. Henrik Melkonyan

    Present address: Datafoundry Labs, Yerevan, Armenia

  2. Marcus S. Dahlem

    Present address: Interuniversity Microelectronics Center (imec), Leuven, Belgium

Authors and Affiliations

  1. Khalifa University of Science and Technology, Abu Dhabi, UAE

    Karen Sloyan, Henrik Melkonyan & Marcus S. Dahlem

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  1. Karen Sloyan
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Sloyan, K., Melkonyan, H. & Dahlem, M.S. Focused ion beam milling for prototyping 2D and 3D photonic structures. Int J Adv Manuf Technol 107, 4469–4480 (2020). https://doi.org/10.1007/s00170-020-05327-5

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