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Erosion of corners and edges on an ion-bombarded silicon surface

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Loughborough University of Technology, LE11 3TU, Leics, UK

    R. Smith & M. A. Tagg

  2. University of Salford, M5 4WT, Manchester, UK

    G. Carter & M. J. Nobes

Authors
  1. R. Smith
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  2. M. A. Tagg
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  3. G. Carter
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  4. M. J. Nobes
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Smith, R., Tagg, M.A., Carter, G. et al. Erosion of corners and edges on an ion-bombarded silicon surface. J Mater Sci Lett 5, 115–120 (1986). https://doi.org/10.1007/BF01671459

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  • DOI: https://doi.org/10.1007/BF01671459

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