Abstract
Densities of N, H, and NH active species have been detected by laser-induced fluorescence (LIF) in N2-xH2 dc flowing discharges. A peak value of N atom densities far x = 0.2–0.5% and a plateau value of H atom densities between x = 1% and 90% in post-discharge conditions (Δ∼0.05 sec, p = 2 torr) has been found. Comparison between LIF measurements of N atoms and the trend of the N2(B, v = II) population shows that the emission from this state can be used for monitoring N atoms. The NH radical has only been detected inside the discharge region.
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References
A. Ricard, J. Oseguera, H. Michel, and M. Gantois,Plasma Surface Engineering 1, 83 Inf. Verlag (1989).
J. P. Lebrun, H. Michel, and M. Gantois,Mem. Sci. Rev. Metall. 69, 727 (1972).
A. Ricard, J. Oseguera, L. Falk, H. Michel, and M. Gantois,IEEE Trans. Plasma Sci. 18, 940 (1990).
G. Cernogora, Thesis, Orsay, 1981.
J. Amorim, J. Loureiro, M. Touzeau, and G. Baravian,Proceedings of the 11th International Symposium on Plasma Chemistry, Loughborough, UK, 1511 (1993).
J. Amorim, G. Baravian, J. Jolly, and M. Touzeau,J. Appl. Phys. 76, 1487 (1994).
L. G. Piper,J. Chem. Phys. 91, 864 (1989).
S. De Benedictis, G. Dilecce, and M. Simek,Chem. Phys. 178, 547 (1993).
Ch. Ottinger, L. G. Smirnova, and F. Vilesov,J. Chem. Phys. 100, 4848 (1994).
A. Ricard, J. Tétreault, and J. Hubert,J. Phys. B 24, 1115 (1991).
P. J. Chantry,J. Appl. Phys. 62, 1141 (1987).
A. N. Wright and C. A. Winkler,Active Nitrogen, Academic Press, New York (1968).
J. A. Dood, S. J. Lipson, D. J. Flanagan, W. A. M. Blumberg, J. C. Person, and B. O. Green,J. Chem. Phys. 94, 4301 (1991).
Nonequilibrium Vibrational Kinetics, M. Capitelli, ed.,Top. Curr. Phys. 56, 5 (1986).
J. Loureiro and A. Ricard,J. Phys. D 26, 163 (1993).
R. Nagpal and A. Garscaden,Bull. Am. Phys. Soc. 38, 28 (1993); A. Garscaden and R. Nagpal,Plasma Source Sci. Technol. 4, 268 (1995).
Y. B. Golubowski and V. M. Telezhko,Sov. Phys. Tech. Phys. 29, 727 (1984).
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On leave from Instituto Tecnológico de Aeronáutica, CNPq, Brazil.
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Amorim, J., Baravia, G. & Ricard, A. Production of N, H, and NH active species in N2-H2 dc flowing discharges. Plasma Chem Plasma Process 15, 721–731 (1995). https://doi.org/10.1007/BF01447069
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DOI: https://doi.org/10.1007/BF01447069