Abstract
Established techniques of making thin foils of non-metallic materials are reviewed briefly and their inadequacies outlined. The preparation of foils by sputter-etching is described and the effects on the sample of ion current density, and angle of ion incidence are discussed. Results on specimens of ceramics, glasses and minerals are presented. From these it is concluded that sputter-etching is a valuable and nearuniversal thinning technique for non-metals.
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References
S. Amelinckx, “The Direct Observation of Dislocations”. Solid state Physics, Supplement 6 (Academic Press, London, 1964).
P. B. Hirsch, A. Howie, R. B. Nicholson, D. W. Pashley, andM. J. Whelan, “Electron Microscopy of Thin Crystals”. (Butterworths, London, 1965).
G. W. Groves, J. Washburn, A. Kelly, andG. K. Williamson,Phil. Mag. 5 (1960) 991.
D. J. Barber,Phys. Stat. Sol. 16 (1966) 531.
D. J. Barber, andN. J. Tighe,Phil. Mag. 11 (1965) 495;ibid 14 (1966) 531.
D. J. Barber andE. N. Farabaugh,J. Appl. Phys. 36 (1965) 2803.
R. C. Rau,J. Nucl. Matls. 20 (1966) 141.
I. M. Stewart andL. Green,J. Sci. Instr. 44 (1967) 216.
P. F. James andP. W. McMillan,Phil. Mag. 18 (1968) 863.
A. F. Prebus andJ. M. Michener,Ind. Eng. Chem. 46 (1954) 147.
S. G. Fleet andP. H. Ribbe,Min. Mag. 35 (1965) 165.
H. U. Nissen,Beitr. Mineral. Petrol. Dtsch. 16 (1967) 354.
A. C. McLaren andP. P. Phakey,Austr. J. Phys. 18 (1965) 135.
L. A. Bursill andA. C. McLaren,Phys. Stat. Sol. 13 (1966) 331.
P. E. Doherty andR. R. Leombruno,J. Amer. Ceram. Soc. 47 (1964) 368.
T. P. Seward, D. R. Uhlmann, D. Turnbull, andG. R. Pierce,J. Amer. Ceram. Soc. 50 (1967) 25.
W. R. Grove,Phil. Trans. 142 (182) 87.
G. A. Keig andH. R. Haines,Trans. Brit. Ceram. Soc. 62 (1963) 363.
A. I. Krokhina, G. V. Spivak, andV. V. Shakmanov, “The Glassy State”, Part I (Izd. AN. U.S.S.R. Moscow-Leningrad, 1963) p. 236.
B. Heitel andK. Meyerhoff,Z. Physik. 165 (1965) 47.
B. Genty, “Le Bombardment Ionique” Proc. Conf. held at Bellevue, France, 1961. (C.N.R.S. France, 1962) p. 95.
M. Paulus andF. Reverchon,ibid p. 223.
N. J. Tighe, Proc. 15th Sagamore Army Materials Research Conference, Raquette Lake, New York, August 1968.
C. M. Drum,Phys. Stat. Sol. 9 (1965) 635.
Y. Shimomura, S. Minamigawa, andS. Saito,Bull. Univ. Osaka Prefect. A12 (1964) 139.
W. M. Hirthe, A. T. Melville, andP. H. Wackman,Rev. Sci. Instr. 38 (1967) 223.
O. Almen andG. Bruce,J. Nucl. Instr. and Methods 11 (1961) 257.
N. J. Tighe andA. Hyman, “Anisotropy in Single Crystal Refractory Compounds”, edited by F. W. Vahldiek and S. A. Mersol. Proc. Int. Symp., Dayton, Ohio, June 1967 (Plenum Press, New York, 1968) p. 121.
D. Clinton andR. P. Miller, private communication.
P. Champness, private communication.
A. D. G. Stewart andM. W. Thompson,J. Mater. Sci. 4 (1969) 56.
D. J. Mazey, R. S. Nelson, andP. A. Thackery,ibid 3 (1968) 26.
M. Navez, Cl. Sella, andD. Chaperot, “Le Bombardment Ionique”, Proc. Conf. held at Bellevue, France, 1961 (C.N.R.S. France, 1962) p. 233.
N. J. Tighe andJ. R. Kreglo, 70th Annual Meeting, Amer. Ceram. Soc. Chicago, 1968.
J.-J. Trillat andK. Mihama,C.R. Acad. Sci 248 (1959) 2827.
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Barber, D.J. Thin foils of non-metals made for electron microscopy by sputter-etching. J Mater Sci 5, 1–8 (1970). https://doi.org/10.1007/PL00020250
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DOI: https://doi.org/10.1007/PL00020250