Abstract
In this paper, a compact 3-DOF mobile microrobot with sub-micron resolution is presented. It has many outstanding features: it is as small as a coin ; its precision is of sub-micrometer resolution on the plane; it has an unlimited travel range; and it has simple and compact mechanisms and structures which can be realized at low cost. With the impact actuating mechanism, this system enable both fast coarse motion and highly precise fine motion with a pulse wave input voltage controlled. The 1-DOF impact actuating mechanism is modeled by taking into consideration the friction between the piezoelectric actuator and base. This modeling technique is extended to simulate the motion of the 3-DOF mobile robot. In addition, experiments are conducted to verify that the simulations accurately represent the real system. The modeling and simulation results will be used to design the model-based controller for the target system. The developed system can be used as a robotic positioning device in the micromanipulation system that determines the position of micro-sized components or particles in a small space, or assemble them in the mesoscale structure.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Adriaens, H., et al., 2000, “Modeling Piezoelectric Actuators,”IEEE/ASME Transactions on Mechatronics, Vol. 5, No. 4, pp. 331–341.
Fahlbusch, S. and Fatikow, S., 2001, “Implementaton of Self-Sensing SPM Cantilevers for Nano-Force Measurement in Microrobotics,” Ultramicroscopy, Vol. 86, pp. 181–190.
Higuchi, T., et al., 1990, “Precise Positioning Mechanism Utilizing rapid Deformations of Piezoelectric Elements,”Micro Electro Mechanical Systems, Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE, pp. 222–226.
Juhas, L., et al., 2000, “Development of Platform for Micro-Positioning Actuated by Piezo-Legs,”Proceedings of the 2000 IEEE International Conference on Robotics & Automation, San Francisco, CA, pp. 3647–3653.
Kim, D. H., et al., 2002, “Implementation of Self-Sensing MEMS Cantilevers for Nanomanipulation,” Proc. the 4th Korean MEMS conference, pp. 120–125.
Lee, J. K., et al., 1999, “Piezoelectric Smart Structures for Noise Reduction in a Cabin,”KSME International Journal, Vol. 13, No. 6, pp. 451–458.
Martel, S., et al., 1999, “NanoWalker: A Fully Autonomous Highly Integrated Miniature Robot for Nano-Scale Measuremtents,” Proceedings of the European Optical Society (EOS) and SPIE International Symposium on Enviosense, Microsystems Metrology and Inspection, Vol. 3825, Munich, Germany 12 pages.
Mendes, J., et al., 1996, “Printed Board Positioning System Using Impact Drive Mechanism,” SICE, Tottori, pp 1123–1128.
Michael, G. and Nikola, C., 1997, “Modeling Piezoelectric Stack Actuators for Control of Micromanipulation,”IEEE Control Systems Magazine, Vol. 17, No. 3. pp. 69–79.
Nam, Y. S. and Sasaki, M., 2002, “Strain Rate Self-Sensing for a Cantilevered Piezoelectric Beam,”KSME International Journal, Vol. 16, No. 3, pp. 310–319.
Oh, J. E., et al., 2000, “Active Vibration Control of Flexible Cantilever Beam Using Piezo Actuator and Filtered-X LMS Algorithm,”KSME International Journal, Vol. 12, No. 4, pp. 665–671.
Sheppard, C. J. R., 1997,Confocal Laser Scanning Microscopy, Springer.
Shim, J. Y. and Gweon, D. G., 2001, “Piezo-Driven Metrological Multiaxis Nanopositoner,”Review of Science Instruments, Vol. 72, No. 11, pp. 4183–4187.
Yamagata, Y. and Higuchi, T., 1995, “A Micropositioning Device for Precision Automatic Assembly Using Impact Force of Piezoelectric Elements,”IEEE International Conference on Robotics and Automation, Nagoya, Aichi, Japan, pp. 666–671.
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Park, J., Kim, DH., Kim, B. et al. Design and performance evaluation of a 3-DOF mobile microrobot for micromanipulation. KSME International Journal 17, 1268–1275 (2003). https://doi.org/10.1007/BF02982468
Received:
Revised:
Published:
Issue Date:
DOI: https://doi.org/10.1007/BF02982468