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A critical evaluation of low-energy electron impact cross sections for plasma processing modeling. I: Cl2, F2, and HCl

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Abstract

The available information on low-energy electron impact cross sections for Cl2, F2, and HCAl is reviewed and critically evaluated. Of interest are the cross sections for momentum transfer; rotational, vibrational, and electronic excitation (with possible dissociation); and attachment and ionization. The bulk of the data available for these molecules are on dissociative attachment, as that is the property, that has been of greatest interest in applications and is relatively easy to measure. Much of the process of critical evaluation is performed by computing electron transport, or swarm, coefficients using the published cross sections and comparing with published measurements. What little is known about electronic excitation or dissociation processes is theoretical or even guessed at using analogies to processes in other molecules. Recommended cross sections are identified where feasible.

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Morgan, W.L. A critical evaluation of low-energy electron impact cross sections for plasma processing modeling. I: Cl2, F2, and HCl. Plasma Chem Plasma Process 12, 449–476 (1992). https://doi.org/10.1007/BF01447254

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