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The effects of second-component gases on the transport properties of silicon nitriding atmosphere

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, PO Box 150, Cheongryang, Seoul, Korea

    Heung Kim & Chong Hee Kim

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  1. Heung Kim
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  2. Chong Hee Kim
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Kim, H., Kim, C.H. The effects of second-component gases on the transport properties of silicon nitriding atmosphere. J Mater Sci Lett 3, 199–200 (1984). https://doi.org/10.1007/BF00726791

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  • DOI: https://doi.org/10.1007/BF00726791

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