Annealing behavior ot trap-centers in silicon containing A-swirl defects

Abstract

The annealing behavior of trap-centers was studied in float-zone silicon wafers containing A-swirl defects. Samples from areas of high and low A-swirl density were annealed in nitrogen ambient between 100° and 900 °C, and analysed using the Deep Level Transient Spectroscopy. The results indicate, that two levels atE _c }-0.07 eV,σ _n=4.6×10⁻¹⁶ cm², andE _c−0.49eV,σ _n=6.6×10⁻¹⁶cm² are caused by one defect, for which the silicon di-selfinterstitial is a likely interpretation. A level atE _c }-0.11 eV was assigned to interstitial carbon. Both defects annealed out at about 170 °C. After 600 °C annealing an additional level atE _c−0.2 eV was detected, which was attributed to an interstitial silicon carbon complex. Heat treatment at 800 °C generated a new level atE _c−0.49 eV,σ _n=2.9×10⁻¹⁶cm² only in the area of high A-swirl defect density. This level was also observed after oxidation and subsequent annealing of silicon.