Abstract
ThemetalorganicplasmaenhancedChemicalVapourDeposition (MOPECVD) of gold films at room temperature using dimethyl(2,4-pentane-dionato)gold(III) as starting material is reported. By adding oxygen or propene to the rf glow discharge, films of Au oxide and of a composite gold polymer, respectively, were obtained.
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References
F.A. Lowenheim: Deposition of Inorganic Films from Solutions, and J.L. Vossen, J.J. Cuomo: Glow Discharge Sputter Deposition, in:Thin Film Processes, ed. by J.I. Vossen, W. Kern (Academic, New York 1978) pp. 209–255 and 12–62, respectively
A.J. Perry, N.J. Archer: AGARD Lect. Ser. No. 106, and Mat. Coating Tech.4, 1–16 (1980)
C.H.J. v.d. Brekel, A.K. Jansen: J. Cryst. Growth43, 488 (1978)
G.J. Fisanick, J.B. Hopkins, M.E. Gross, M.D. Fennell, K.J. Schnoes: Appl. Phys. Lett.46, 1184–1186 (1985)
T.H. Baum, C.R. Jones: J. Vac. Sci. Technol. B4, 1187–1191 (1986)
D.G. Teer: AGARD Lect. Ser. No. 106 and Mat. Coating Tech.3, 1–13 (1980)
P.J. Martin, W.G. Sainty, R.G. Netterfield, A.N. Buckley: Vaccum35, 621–624 (1985)
L. Martinu, H. Biederman, J. Zemek: Vacuum35, 171–176 (1985)
J. Perrin, B. Despax, V. Hanchett, E. Kay: J. Vac. Sci. Technol. A4, 46–51 (1986)
D.W. Hess: Annu. Rev. Mater. Sci.16, 163–183 (1986)
F.H. Brain, G.S. Gibson: J. Chem. Soc.I, 762–767 (1939)
L. Gmelin:Handbuch der Anorg. Chemie, Bd.62, 732 (1954)
C.S. Gibson, W.M. Colles: J. Chem. Soc.1931, II 2407 (1931)
S. Komiya, J.K. Kochi: J. Am. Chem. Soc.99, 3695–3704 (1977)
M.G. Miles, G.E. Glass, R.S. Tobias: J. Am. Chem. Soc.88, 5738–5744 (1966)
E. Feurer, H. Suhr: Thin Solid Films (in press)
J. Donohue:The Structure of the Elements (Wiley, New York 1974) pp. 222–224
E. Schwarzmann, J. Mohn, H. Rumpel: Z. Naturforsch. B31, 135 (1976)