Skip to main content
SpringerLink
Log in

A Review of Failure Mode and Effects Analysis (FMEA) for Sustainable Manufacturing and Improvement in Electrostatic Chuck Manufacture and Operation

  • Conference paper
  • First Online:
Sustainable Design and Manufacturing (SDM 2022)

Part of the book series: Smart Innovation, Systems and Technologies ((SIST,volume 338))

Included in the following conference series:

  • 1060 Accesses

Abstract

Failure modes and effect analysis (FMEA) is widely used in industry to quantify, mitigate, and eliminate risk for products and processes. It has the potential to be an important technique in supporting sustainable manufacturing by reducing the risks associated with transitioning to more sustainable processes. Whilst traditional FMEA does quantify risk by calculating a risk priority number (RPN), there are limitations to the usefulness of this due to the lack of objectiveness inherent in the method. In this paper improvements to the traditional FMEA approach are reviewed and their appropriateness in the specific case of the manufacture of electrostatic chucks (ESC) is considered.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 299.00
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 379.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 379.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

References

  1. Badurdeen, F., Jawahir, I.S.: Strategies for value creation through sustainable manufacturing. Procedia Manuf. 8, 20–27 (2017)

    Article  Google Scholar 

  2. Enyoghasi, C., Badurdeen, F.: Industry 4.0 for sustainable manufacturing: Opportunities at the product, process, and system levels. Resour., Conserv. Recycl. 166, 105362 (2021)

    Google Scholar 

  3. Boral, S., Howard, I., Chaturvedi, S., Mckee, K., Naikan, V.: A novel hybrid multi-criteria group decision making approach for failure mode and effect analysis: An essential requirement for sustainable manufacturing. Sustain. Prod. Consum. 21, 14–32 (2020)

    Article  Google Scholar 

  4. Nguyen, T.-L., Shu, M.-H., Hsu, B.-M.: Extended FMEA for sustainable manufacturing: an empirical study in the non-woven fabrics industry. Sustainability 8(9), 939 (2016)

    Article  Google Scholar 

  5. Malsch, I., Subramanian, V., Semenzin, E., Hristozov, D.: Supporting decision-making for sustainable nanotechnology. Environ. Syst. Decis. 35(1), 54–75 (2015)

    Article  Google Scholar 

  6. Wang, L.-E., Liu, H.-C., Mei-Yun Quan, M.-Y.: Evaluating the risk of failure modes with a hybrid MCDM model under interval-valued intuitionistic fuzzy environments. Comput. Ind. Eng. 102, 175–185 (2016)

    Article  Google Scholar 

  7. de Souza, F.H., Gaviao, L.O., Sant’anna, A.P., Lima, G.B.A.: Prioritising risks with composition of probabilistic preferences and weighting of FMEA for fast decision making in complex scenarios. Int. J. Manag. Proj. Bus. 15(4), 572–594 (2021)

    Article  Google Scholar 

  8. Kutlu, A.C., Ekmekçioğlu, M.: Fuzzy failure modes and effects analysis by using fuzzy TOPSIS-based fuzzy AHP. Expert. Syst. Appl. 39, 61–67 (2012)

    Article  Google Scholar 

  9. Cabanes, B., Hubac, S., Lemasson, P., Benoit, W.: Improving reliability engineering in product development based on design theory: the case of FMEA in the semiconductor industry. Res. Eng. Des. 32(3), 309–329 (2021)

    Article  Google Scholar 

  10. Dagsuyu, C., Gocmen, E., Narli, M., Kokangul, A.: Classical and fuzzy FMEA risk analysis in a sterilization unit. Comput. Ind. Eng. 101, 286–294 (2016)

    Article  Google Scholar 

  11. Liu, H.-C., You, J.-X., Duan, C.-Y.: An integrated approach for failure mode and effect analysis under interval-valued intuitionistic fuzzy environment. Int. J. Prod. Econ. 207, 163–172 (2019)

    Article  Google Scholar 

  12. Liu, H.-C., Liu, L., Liu, N.: Risk evaluation approaches in failure mode and effects analysis: a literature review. Expert. Syst. Appl. 40, 828–838 (2013)

    Article  Google Scholar 

  13. Mardani, A., Jusoh, A., Nor, K.M., Khalifah, Z., Zakwan, N., Valipour, A.: Multiple criteria decision-making techniques and their applications—a review of the literature from 2000 to 2014. Econ. Res.-Ekon. Istraz. 28(1), 516–571 (2015)

    Google Scholar 

  14. Adar, E., Ince, M., Karatop, B., Bilgili, M.S.: The risk analysis by failure mode and effect analysis (FMEA) and fuzzy-FMEA of supercritical water gasification system used in the sewage sludge treatment. J. Environ. Chem. Eng. 5, 1261–1268 (2017)

    Article  Google Scholar 

  15. Golcuk, I.: Interval type-2 fuzzy interence-based failure mode and effect analysis model in a group decision-making setting, Kybernetes, Vol. ahead of print (2021)

    Google Scholar 

  16. Carpitella, S., Certa, A., Izquierdo, J., La Fata, C.M.: A combined multi-criteria approach to support FMECA analyses: a real-world case. Reliab. Eng. Syst. Saf. 169, 394–402 (2018)

    Article  Google Scholar 

  17. Fattahi, R., Khalilzadeh, M.: Risk evaluation using a novel hybrid method based on FMEA, extended MULTIMOORA, and AHP methods under fuzzy environment. Saf. Sci. 102, 290–300 (2018)

    Article  Google Scholar 

  18. Mandal, S., Maiti, J.: Risk analysis using FMEA: Fuzzy similarity value and possibility theory based approach. Expert. Syst. Appl. 41, 3527–3537 (2014)

    Article  Google Scholar 

  19. Shaker, F., Shahin, A., Jahanyan, S.: Developing a two-phase QFD for improiving FMEA: an integrative approach. Int. J. Qual. Reliab. Manag. 36(8), 1454–1474 (2019)

    Article  Google Scholar 

  20. Shaker, F., Shahin, A., Jahanyan, S.: Investigating the causal relationships among failure modes, effects and causes; a system dynamics approach. International Journal of Quality and Reliability Management, Vol. ahead of print (2021)

    Google Scholar 

  21. Emovon, I., Mgbemena, C.O.: Enhancing the FMEA technique using a combination of Expectation interval, TAGUCHI, MOORA and Geometric Mean methods. J. Eng. Res. 7, 238–260 (2019)

    Google Scholar 

  22. Wang, X.K., Cheng, J., Wang, K.S., Yang, Y.Y., Sun, Y.C., Cao, M.L., Han, C.K., Ji, L.H.: Modeling of electrostatic chuck and simulation of electrostatic force. In: Applied Mechanics and Materials, vol. 511–512 (Sensors, Mechatronics and Automation), pp. 588–594 (2014)

    Google Scholar 

  23. Reda, H., Dvivedi, A.: Decision-making on the selection of lean tools using fuzzy QFD and FMEA approach in the manufacturing industry. Expert. Syst. Appl. 192, 116416 (2022)

    Google Scholar 

  24. Marriott, B., Arturo Garza‐Reyes, J., Soriano‐Meier, H., Antony, J.: An integrated methodology to prioritise improvement initiatives in low volume‐high integrity product manufacturing organisations. J. Manuf. Technol. Manag. 24, 197–217 (2013)

    Google Scholar 

  25. Hettiarachchi, R.L., Koomsap, P. & Ardeneam, P. 2021. VIKOR power law-based customer-oriented FMEA with complete unique risk priority numbers. International Journal of Quality & Reliability Management, Vol. ahead of print.

    Google Scholar 

  26. Moreira, A.C., Ferreira, L.M.D.F., Silva, P.: A case study on FMEA-based improvement for managing new product development risk. Int. J. Qual. Reliab. Manag. 38, 1130–1148 (2021)

    Article  Google Scholar 

  27. Peeters, J.F.W., Basten, R.J.I., Tinga, T.: Improving failure analysis efficiency by combining FTA and FMEA in a recursive manner. Reliab. Eng. & Syst. Saf. 172, 36–44 (2018)

    Article  Google Scholar 

  28. Filho, J.C.B., Piechnicki, F., de Freitas Rocha Loures, E., Santos, E.A.P.: Process-aware FMEA framework for failure analysis in maintenance. J. Manuf. Technol. Manag. 28(6), 822–848 (2017)

    Google Scholar 

  29. Sana, M., Saleem, U., Farooq, M., Qamar, A., Bhutta, M., Zafar, S.: Identification of failure modes on electrostatic chuck through reliability centered maintenance: a case study. Proc Pak. Acad. Sci. A 55(2), 21–32 (2018)

    Google Scholar 

Download references

Acknowledgements

The ASTUTE 2020 (Advanced Sustainable Manufacturing Technologies) operation is part funded through the European Regional Development Fund (ERDF), the participating Higher Educational Institutions in Wales and KLA, SPTS Division, Newport, South Wales.

Author information

Authors and Affiliations

  1. University of South Wales, South Wales Business School, Pontypridd, CF37 1DL, Wales, UK

    Steffan James & Hefin Rowlands

Authors
  1. Steffan James
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Hefin Rowlands
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Steffan James .

Editor information

Editors and Affiliations

  1. Karlsruhe Institute of Technology, Karlsruhe, Germany

    Steffen G. Scholz

  2. KES International Research, Shoreham-by-sea, UK

    Robert J. Howlett

  3. School of Engineering, Cardiff University, Cardiff, UK

    Rossi Setchi

Rights and permissions

Reprints and permissions

Copyright information

© 2023 The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd.

About this paper

Check for updates. Verify currency and authenticity via CrossMark

Cite this paper

James, S., Rowlands, H. (2023). A Review of Failure Mode and Effects Analysis (FMEA) for Sustainable Manufacturing and Improvement in Electrostatic Chuck Manufacture and Operation. In: Scholz, S.G., Howlett, R.J., Setchi, R. (eds) Sustainable Design and Manufacturing. SDM 2022. Smart Innovation, Systems and Technologies, vol 338. Springer, Singapore. https://doi.org/10.1007/978-981-19-9205-6_15

Download citation

  • DOI: https://doi.org/10.1007/978-981-19-9205-6_15

  • Published:

  • Publisher Name: Springer, Singapore

  • Print ISBN: 978-981-19-9204-9

  • Online ISBN: 978-981-19-9205-6

  • eBook Packages: EngineeringEngineering (R0)

Publish with us

Policies and ethics

Search

Navigation