Abstract
Changes in thermal transformation properties due to annealing and consequent cooling within the temperature ranged from 30 to 1400 °C were studied for (Zr–Ti–Nb)N coatings by differential scanning calorimetry (DSC) measurements in an argon atmosphere. Temperature and phase transformations in investigated coatings occurred in two stages: at intermediate temperature region (>670 °C) and high-temperature region (>1100 °C). There were also noticeable changes in values of heat capacity depending on nitrogen pressure applied during a deposition process.
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References
Navinsek B, Seal S (2001) Transition metal nitride functional coatings. JOM 53:51–54. https://doi.org/10.1007/s11837-001-0072-1
Chen JG (1996) Carbide and nitride overlayers on early transition metal surfaces: preparation, characterization, and reactivities. Chem Rev 96:1477–1498. https://doi.org/10.1021/cr950232u
Pogrebnyak AD, Shpak AP, Azarenkov NA et al (2009) Structures and properties of hard and superhard nanocomposite coatings. Phys Usp 52:29–54. https://doi.org/10.3367/UFNr.0179.200901b.0035
Pogrebnjak AD, Beresnev VM, Kolesnikov DA et al (2013) Multicomponent (Ti-Zr-Hf-V-Nb)N nanostructure coatings fabrication, high hardness and wear resistance. Acta Phys. Polonica A 123:816–818. https://doi.org/10.12693/APhysPolA.123.816
Pogrebnjak AD, Bor’ba SO, Kravchenko YaO et al (2016) Effect of the high doze of N+ (1018 cm−2) ions implantation into the (TiHfZrVNbTa)N nanostructured coating on its microstructure, elemental and phase compositions, and physico-mechanical properties. J Superhard Mater 38:393–401. https://doi.org/10.3103/S1063457616060034
Maksakova O, Simoẽs S, Pogrebnjak A et al (2018) The influence of deposition conditions and bilayer thickness on physical-mechanical properties of CA-PVD multilayer ZrN/CrN coatings. Mater Charact 140:189–196. https://doi.org/10.1016/j.matchar.2018.03.048
Pogrebnjak AD, Bazyl EA (2001) Modification of wear and fatigue characteristics of Ti-V-Al alloy by Cu and Ni ion implantation and high-current electron beam treatment. Vacuum 64(1):1–7. https://doi.org/10.1016/S0042-207X(01)00160-9
Pogrebnjak AD, Beresnev VM, Smyrnova KV et al (2018) The influence of nitrogen pressure on the fabrication of the two-phase superhard nanocomposite (TiZrNbAlYCr)N coatings. Mater Lett 211:316–318. https://doi.org/10.1016/j.matlet.2017.09.121
Berladir KV, Budnik AO, Dyadyura KA et al (2016) Physicochemical principles of the technology of formation of polymer composite materials based on polytetraflouroethylene – a review. High Temp Mater Process 20(2):157–184. https://doi.org/10.1615/HighTempMatProc2016017875
Cramer CJ, Truhlar DG (2009) Density functional theory for transition metals and transition metal chemistry. Phys Chem 11:10757–10816. https://doi.org/10.1039/b907148b
Ivashchenko VI, Veprek S, Argon AS et al (2015) First-principles quantum molecular calculations of structural and mechanical properties of TiN/SiNx heterostructures, and the achievable hardness of the nc-TiN/SiNx nanocomposites. Thin Solid Films 578:83–92. https://doi.org/10.1016/j.tsf.2015.02.013
Ivashchenko VI, Veprek S, Turchi PEA et al (2014) First-principles molecular dynamics investigation of thermal and mechanical stability of the TiN(001)/AlN and ZrN(001)/AlN heterostructures. Thin Solid Films 564:284–293. https://doi.org/10.1016/j.tsf.2014.05.036
Milošev I, Strehblow HH, Navinšek B (1997) Comparison of TiN, ZrN and CrN hard nitride coatings: Electrochemical and thermal oxidation. Thin Solid Films 303(1–2):246–254. https://doi.org/10.1016/S0040-6090(97)00069-2
Bondar OV, Postol’nyi BA, Beresnev VM et al (2015) Composition, structure and tribotechnical properties of TiN, MoN single-layer and TiN/MoN multilayer coatings. J. Superhard Mater 37(1):27–38. https://doi.org/10.3103/S1063457615010050
Mercier F, Coindeau S, Lay S et al (2014) Niobium nitride thin films deposited by high temperature chemical vapor deposition. Surf Coatings Technol 260:126–132. https://doi.org/10.1016/j.surfcoat.2014.08.084
Benkahoul M, Martinez E, Karimi A et al (2004) Structural and mechanical properties of sputtered cubic and hexagonal NbNx thin films. Surf Coatings Technol 180–181:178–183. https://doi.org/10.1016/j.surfcoat.2003.10.040
McIntyre D, Greene JE, Håkansson G et al (1990) Oxidation of metastable single-phase polycrystalline Ti0.5Al0.5 N films: kinetics and mechanisms. J Appl Phys 67:1542–1553. https://doi.org/10.1063/1.345664
Deeleard T, Buranawong A, Choeysuppaket A et al (2012) Structure and composition of TiVN thin films deposited by reactive DC magnetron co-sputtering. Proc Eng 32:1000–1005. https://doi.org/10.1016/j.proeng.2012.02.045
Cheng YH, Browne T, Heckerman B et al (2010) Mechanical and tribological properties of nanocomposite TiSiN coatings. Surf Coatings Technol 204(14):2123–2129. https://doi.org/10.1016/j.surfcoat.2009.11.034
Rogström L, Ghafoor N, Schroeder J et al (2015) Thermal stability of wurtzite Zr1-xAlxN coatings studied by in situ high-energy x-ray diffraction during annealing. J Appl Phys 118:035309. https://doi.org/10.1063/1.4927156
Jiang X, Yang FC, Chen WC et al (2017) Effect of nitrogen-argon flow ratio on the microstructural and mechanical properties of AlSiN thin films prepared by high power impulse magnetron sputtering. Surf Coatings Technol 320:138–145. https://doi.org/10.1016/j.surfcoat.2017.01.085
Kasiuk JV, Fedotova JA, Koltunowicz TN et al (2014) Correlation between local Fe states and magnetoresistivity in granular films containing FeCoZr nanoparticles embedded into oxygen-free dielectric matrix. J Alloys Compd 586:S432–S435. https://doi.org/10.1016/j.jallcom.2012.09.058
Boiko O, Koltunowicz TN, Zukowski P et al (2017) The effect of sputtering atmosphere parameters on dielectric properties of the ferromagnetic alloy—ferroelectric ceramics nanocomposite (FeCoZr)x(PbZrTiO3)(100−x). Ceram Int 43(2):2511–2516. https://doi.org/10.1016/j.ceramint.2016.11.052
Saladukhin IA, Abadias G, Michel A et al (2015) Structure and hardness of quaternary TiZrSiN thin films deposited by reactive magnetron co-sputtering. Thin Solid Films 581:25–31. https://doi.org/10.1016/j.tsf.2014.11.020
Riedl H, Holec D, Rachbauer R et al (2013) Phase stability, mechanical properties and thermal stability of Y alloyed Ti-Al-N coatings. Surf Coatings Technol 235:174–180. https://doi.org/10.1016/j.surfcoat.2013.07.030
Koller CM, Hollerweger R, Sabitzer C et al (2014) Thermal stability and oxidation resistance of arc evaporated TiAlN, TaAlN, TiAlTaN, and TiAlN/TaAlN coatings. Surf Coatings Technol 259:599–607. https://doi.org/10.1016/j.surfcoat.2014.10.024
Abadias G, Saladukhin IA, Uglov VV et al (2013) Thermal stability and oxidation behavior of quaternary TiZrAlN magnetron sputtered thin films: Influence of the pristine microstructure. Surf Coatings Technol 237:187–195. https://doi.org/10.1016/j.surfcoat.2013.07.055
Miletić A, Panjan P, Škorić B et al (2014) Microstructure and mechanical properties of nanostructured Ti-Al-Si-N coatings deposited by magnetron sputtering. Surf Coatings Technol 241:105–111. https://doi.org/10.1016/j.surfcoat.2013.10.050
Mitterer C (2014) PVD and CVD Hard Coatings. In: Sarin VK, Llanes L, Mari D (eds) Comprehensive Hard Materials, 1st edn, vol 2. Elsevier, pp 449–467. https://doi.org/10.1016/B978-0-08-096527-7.00035-0
Pogrebnjak AD, Lebed AG, Ivanov YF (2001) Modification of single crystal stainless steel structure (Fe-Cr-Ni-Mn) by high-power ion beam. Vacuum 63(4):483–486. https://doi.org/10.1016/S0042-207X(01)00225-1
Kadyrzhanov DB, Zdorovets MV, Kozlovskiy AL et al (2018) Influence of ionizing irradiation on the parameters of Zn nanotubes arrays for design of flexible electronics elements. Devices Methods Meas 9(1):66–73. https://doi.org/10.21122/2220-9506-2018-9-1-66-73
Beresnev VM, Sobol OV, Grankin SS et al (2016) Physical and mechanical properties of (Ti–Zr–Nb)N coatings fabricated by vacuum-arc deposition. Inorg Mater Appl Res 7(3):388–394
Pogrebnjak A, Maksakova O, Kozak C et al (2016) Physical and mechanical properties of nanostructured (Ti-Zr-Nb)N coatings obtained by vacuum-arc deposition method. Prz Elektrotechniczny (8):180–183. https://doi.org/10.15199/48.2016.08.49
Pogrebnjak AD, Rogoz VM, Bondar OV et al (2016) Structure and physicomechanical properties of NbN-based protective nanocomposite coatings: a review. Prot Met Phys Chem Surfaces 52:802–813. https://doi.org/10.1134/S2070205116050191
Pogrebnjak AD, Bondar OV, Abadias G et al (2016) Structural and mechanical properties of NbN and Nb-Si-N films: experiment and molecular dynamics simulations. Ceram Int 42(10):11743–11756. https://doi.org/10.1016/j.ceramint.2016.04.095
Keogh DW (2011) Encyclopedia of inorganic and bioinorganic chemistry. https://doi.org/10.1002/9781119951438
Gribaudo L, Arias D, Abriata J (1994) The N-Zr (Nitrogen-Zirconium) System. J Phase Equilibria 15(4):441–449. https://doi.org/10.1007/BF02647575
Pogrebnjak AD, Bagdasaryan AA, Yakushchenko IV et al (2014) The structure and properties of high-entropy alloys and nitride coatings based on them. Russ Chem Rev 83(11):1027–1061
Hultman L (2000) Thermal stability of nitride thin films. Vacuum 57(1):1–30. https://doi.org/10.1016/S0042-207X(00)00143-3
Acknowledgements
The authors gratefully to Ministry of Education and Science of Ukraine for financial support (Project No. 0118U003579 and 0117U003923). Authors are very thankful to Prof. A. D. Pogrebnjak from Sumy State University for project supervision and analysis of results and Prof. V. M. Beresnev from V. N. Karazin Kharkiv National University for deposition of the samples.
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Maksakova, O.V., Kylyshkanov, M.K., Simoẽs, S. (2019). DSC Investigations of the Effect of Annealing Temperature on the Phase Transformation Behaviour in (Zr–Ti–Nb)N Coatings Deposited by CA-PVD. In: Pogrebnjak, A.D., Novosad, V. (eds) Advances in Thin Films, Nanostructured Materials, and Coatings. Lecture Notes in Mechanical Engineering. Springer, Singapore. https://doi.org/10.1007/978-981-13-6133-3_4
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