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Reception Performance Enhancement of Capacitive Micromachined Ultrasonic Transducers Via Modified Membrane Structures

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The 16th International Conference on Biomedical Engineering

Part of the book series: IFMBE Proceedings ((IFMBE,volume 61))

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Abstract

This paper presents a method to enhance the reception performance of capacitive micromachined ultrasonic transducers (CMUTs) working in conventional mode and water immersion by adjusting the framework of vibrating membrane. The core conception of the enhancement is to reduce the system stiffness to improve both static membrane deflection under DC bias voltage and membrane displacement by harmonic analysis under acoustic pressure. Two modified structures of slotted membrane and corrugated membrane are presented respectively and the CMUT modeling is constructed and analyzed via finite element analysis (FEA) simulations by means of COMSOL Multiphysics. By using the modified membrane structures, FEA simulation shows that both the electromechanical coupling coefficient and receiving sensitivity are improved up to 20.9% and 50.5% for slotted membrane and 5.0% and 38.3% for corrugated membrane, respectively.

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Author information

Authors and Affiliations

  1. State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau, China

    Xiao Jiang, Yuanyu Yu, Jiujiang Wang, Xin Liu, U. Kin Che, Sio Hang Pun & Mang I. Vai

  2. Department of Electrical and Computer Engineering, Faculty of Science and Technology, University of Macau, Macau, China

    Xiao Jiang, Yuanyu Yu, Jiujiang Wang, Xin Liu, Mang I. Vai & Peng Un Mak

Authors
  1. Xiao Jiang
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  2. Yuanyu Yu
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  3. Jiujiang Wang
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  4. Xin Liu
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  5. U. Kin Che
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  6. Sio Hang Pun
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  7. Mang I. Vai
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  8. Peng Un Mak
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Corresponding author

Correspondence to Xiao Jiang .

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Editors and Affiliations

  1. National University of Singapore , Singapore, Singapore

    James Goh

  2. Faculty of Engineering, National Univ of Singapore Faculty of Engineering, Singapore, Singapore

    Chwee Teck Lim

  3. National University of Singapore , Singapore, Singapore

    Hwa Liang Leo

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Jiang, X. et al. (2017). Reception Performance Enhancement of Capacitive Micromachined Ultrasonic Transducers Via Modified Membrane Structures. In: Goh, J., Lim, C., Leo, H. (eds) The 16th International Conference on Biomedical Engineering. IFMBE Proceedings, vol 61. Springer, Singapore. https://doi.org/10.1007/978-981-10-4220-1_21

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  • DOI: https://doi.org/10.1007/978-981-10-4220-1_21

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  • Publisher Name: Springer, Singapore

  • Print ISBN: 978-981-10-4219-5

  • Online ISBN: 978-981-10-4220-1

  • eBook Packages: EngineeringEngineering (R0)

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