Abstract
There is considerable interest in growing diamond layers and thin films for a wide range of applications. Some of these thin film requirements can be met already using existing diamond-like carbon coatings. This paper reviews the use of diamond-like carbon films in infra red optical, mechanical, electronic and biomedical applications.
This is a preview of subscription content, log in via an institution.
Buying options
Tax calculation will be finalised at checkout
Purchases are for personal use only
Learn about institutional subscriptionsPreview
Unable to display preview. Download preview PDF.
References
Aisenberg, S. & Chabot, R. 1971 Ion-beam deposition of thin films of diamond-like carbon. J. appl. Phys. 42, 2953.
Angus, J. C., Koidl, P. & Domitz, S. 1986 Carbon thin films. In Plasma deposited thin films (ed. J. Mort & F. Jansen). CRC Press.
Angus, J. C., Stultz, J. E., Schiller, P. J., Macdonald, J. R., Mirtich, M. J. & Domitz, S. 1984 Composition and properties of the so-called ‘Diamond-like’ amorphous carbon films. Thin Solid Films 118, 311.
Ball, G. J. & Lettington, A. H. 1983 Diamond-like carbon coatings for the photothermal conversion of solar energy. RSRE Memorandum no. 3617.
Bewilogna, K., Dietrich, D., Paget, L., Schürer, X. & Weissmantel, C. 1979 Structure and properties of transparent and hard carbon films. Surf. Sci. 86, 308.
Bowden, F. P. & Young, J. E. 1951 Friction of diamond, graphite, and carbon and the influence of surface films. Proc. R. Soc. Lond. A 208, 444.
Bubenzer, A., Dischler, B., Brandt, G. & Koidl, P. 1983 RF-plasma deposited amorphous hydrogenated hard carbon thin films: Preparation, properties and applications. J. appl. Phys. 54, 4590.
Cox, J. T., Hass, G. & Hunter, W. R. 1975 Infrared reflectance of silicon oxide and magnesium fluoride protected aluminium mirrors at various angles of incidence from 8 fim to 12 jim. Appl. Opt. 14, 1247.
Cox, J. T. & Hass, G. 1978 Aluminium mirrors Al2O3 protected with high reflectance at normal but greatly decreased reflectance at higher angles of incidence in the 8–12 µm region. Appl. Opt. 17, 333.
Dischler, B., Bubenzer, A. & Koidl, P. 1983 Bonding in hydrogenated hard carbon studied by optical spectroscopy. Solid State Commun. 48, 105.
Drummeter, L. F. & Hass, G. 1964 Phys. Thin Films 2, 305.
Enke, K., Dimigen, H. & Hubsch, H. 1980 Frictional properties of diamond-like carbon layers. Appl. Phys. Lett. 36, 291.
Green, G. W. & Lettington, A. H. 1980 U.K. Patent Application GB 2069008.
Grill, A., Meyerson, B. S., Patel, V., Reimer, J. A. & Petich, M. A. 1987 Inhomogeneous carbon bonding in hydrogenated amorphous carbon films. J. appl. Phys. 61, 2874.
Grill, A., Meyersen, B. S. & Patel, V. 1989 Interface modifications for improving the adhesion of a-C:H films to metals. Proc. Soc. Photo-Opt. Instrum. Engng 969, 52.
Hahn, R. E. & Seraphin, B. O. 1978 Spectrally selective surfaces for photothermal energy conversion. Phys. Thin Films 10, 1.
Holland, L. & Ohja, S. M. 1976 Deposition of hard and insulating carbonaceous films on an rf target in a butane plasma. Thin Solid Films 38, L17.
Holland, L. & Ohja, S. M. 1979 The growth of carbon films with random atomic structure from ion impact damage in a hydrocarbon plasma. Thin Solid Films 58, 107.
Janai, M. A., Allred, D. D., Booth, D. C. & Seraphin, B. O. 1979 Optical properties and structure of amorphous silicon films prepared by CVD. Solar Energy Mater. 1, 11.
Jansen, F., Machonkin, M., Kaplan, S. & Hank, S. 1985 The effects of hydrogenation on the properties of ion beam sputter deposited amorphous carbon. J. Vac. Sci. Technol. A 3, 605.
Jenkins, G. M. 1980 Biomedical applications of carbons and graphites. Clin. Phys. Physiol. Meas. 1, 171–194.
Jenkins, G. M. & De Carvallo, F. X. 1977 Biomedical applications of carbon fibre reinforced carbon in implanted prostheses. Carbon 15, 33.
Kapoor, V. J., Mirtich, M. J. & Banks, B. A. 1986 Diamond-like carbon films on semiconductors for insulated-gate technology. J. Vac. Sci. Technol. A4, 1013.
Kim, D. S., Fischer, T. E. & Gallois, B. 1991 The effects of oxygen and humidity on friction and wear of diamond-like carbon films. Surf. Coatings Technol. 49, 537.
Kim, S. B. & Wager, J. F. 1990 Diamond-like carbon films for electroluminescent applications. Surf. Coatings Technol. 43, 99.
Lettington, A. H. 1985 The development, application and testing of diamond-like coatings for infrared components. Proc. Soc. Photo-Opt. Instrum. Engng 590, 100.
Lettington, A. H. & Ball, G. J. 1981 The protection of front surfaced aluminium mirrors with diamond-like carbon coatings for use in the infrared. RSRE Memorandum no. 3295.
Lettington, A. H., Lewis, J. C., Wort, J. C. H., Monachan, B.C. & Hope, A.J.N. 1987 Developments in GeC as a durable IR Coating Material. E-MRS Meeting 17, 469.
Marchon, B., Heiman, N., Khan, M. R., Lautie, A., Ager, J. W. & Veirs, D. K. 1991 Raman and resistivity investigations of carbon overcoats of thin-film media : Correlations with tibological properties. J. appl. Phys. 69, 5748.
Marotta, E., Bakhru, N., Grill, A., Patel, V. & Meyerson, B. 1991 Diamond-like carbon as an electrical insulator of copper devices for chip cooling. Thin Solid Films 206, 188–191.
Moravec, T. J. & Lee, J. C. 1982 The development of diamond-like (i-carbon) thin films as antireflecting coatings for silicon solar cells. J. Vac. Sci. Technol. 20, 338.
Nadler, M. P., Donovan, T. M. & Green, A. K. 1984 Structure of carbon films formed by the plasma decomposition of hydrocarbons. Thin Solid Films 116, 241.
Pellicori, S. F. 1978 Infrared reflectance of a variety of mirrors at 48° incidence. Appl. Opt. 17, 3335.
Rothschild, M., Arnone, C. & Ehrich, D. J. 1986 Eximer-laser etching of diamond and hard carbon films by direct writing and optical projection. J. Vac. Sci. Technol. B4, 310.
Savvides, N. & Window, B. 1985 Diamond-like amorphous carbon films prepared by magnetron sputtering of graphite. J. Vac. Sci. Technol. A3, 2386.
Seraphin, B. O. 1979 Chemical vapour deposition of spectrally selective surfaces.
Tattershall, P. & Minter, E. M. 1991 The rain field conditions of the DRA Aerospace Division whirling arm, rain erosion facility. Technical Report 91063 ,DRA Aerospace Division.
Thomson, L. A., Law, F. C., Rushton, N. & Franks, J. 1991 Biocompatibility of diamond-like carbon coating. Biomater. 12, 37.
Tsai, H-C. & Bogy, D. B. 1987 Characterization of diamond-like carbon films and their application as overcoats on thin film media for magnetic recording. J. Vac. Sci. Technol. A5, 3287.
Van Der Zwagg, S. & Field, J. E. 1983 Indentation and liquid impact studies on coated germanium. Phil. Mag. A 48, 767.
Weissmantel, C. 1977 In Proc. 7th Int. Vacuum Congr. and 3rd Int. Conf. on Solid Surfaces ,p. 1533. Vienna: Berger.
Weissmantel, C. et al. 1980 Structure and properties of quasi-amorphous films prepared by ion beam techniques. Thin Solid Films 72, 19.
Weissmantel, C., Schürer, C., Fröhlich, F., Grau, P. & Lehmann, H. 1979 Mechanical properties of hard carbon films. Thin Solid Films 61, L.5.
Whitmell, D. S. & Williamson, R. 1976 The deposition of hard surface layers by hydrocarbon cracking in a glow discharge. Thin Solid Films 35, 253.
Zelez, J. 1983 Low-stress diamond-like carbon films. J. Vac. Sci. Technol. A1, 305.
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1994 Springer Science+Business Media Dordrecht
About this chapter
Cite this chapter
Lettington, A.H. (1994). Applications of diamond-like carbon thin films. In: Lettington, A.H., Steeds, J.W. (eds) Thin Film Diamond. Springer, Dordrecht. https://doi.org/10.1007/978-94-011-0725-9_10
Download citation
DOI: https://doi.org/10.1007/978-94-011-0725-9_10
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-010-4312-0
Online ISBN: 978-94-011-0725-9
eBook Packages: Springer Book Archive