Chemical Processing with Lasers

1. Front Matter

   Pages I-IX

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2. Introduction

   • Dieter Bäuerle

   Pages 1-4

3. Fundamental Excitation Mechanisms

   • Dieter Bäuerle

   Pages 5-35

4. Laser-Induced Chemical Reactions

   • Dieter Bäuerle

   Pages 36-57

5. Experimental Techniques

   • Dieter Bäuerle

   Pages 58-68

6. Material Deposition

   • Dieter Bäuerle

   Pages 69-134

7. Surface Modifications

   • Dieter Bäuerle

   Pages 135-156

8. Alloying, Compound Formation

   • Dieter Bäuerle

   Pages 157-161

9. Etching, Cutting, Drilling

   • Dieter Bäuerle

   Pages 162-198

10. Comparison of Processing Techniques, Applications of Laser Chemical Processing

    • Dieter Bäuerle

    Pages 199-208

11. Back Matter

    Pages 209-245

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Materials processing with lasers is a rapidly expanding field which is increasingly captivating the attention of scientists, engineers and manufacturers alike. The aspect of most interest to scientists is provided by the basic interaction mechanisms between the intense light of a laser and materials exposed to a chemically reactive or nonreactive surrounding medium. Engineers and manufacturers see in the laser a new tool which will not only make manufacturing cheaper, faster, cleaner and more accurate but which also opens up entirely new technologies and manufacturing methods that are simply not available using existing techniques. Actual and potential applications range from laser machining to laser-induced materials transformation, coating, patterning, etc. , opening up the prospect of exciting new processing methods for micromechanics, metallurgy, integrated optics, semiconductor manufacture and chemical engineering. This book concentrates on the new and interdisciplinary field of 1 aser-i nduced chemicaZ process i ng of materi als. The techni que permits maskless single-step deposition of thin films of metals, semiconductors or insulators with lateral dimensions ranging from a few tenths of a micrometer up to several centimeters. Moreover, materials removal or synthesis, or surface modifications, such as oxidation, nitridation, reduction, metallization and doping, are also possible within similar dimensions. This book is meant as an introduction. It attempts to cater for the very broad range of specific interests which different groups of readers will have, and this thinking underlies the way in which the material has been arranged.

• laser
• metals
• optics
• semiconductor
• thin films

• Angewandte Physik, Johannes-Kepler-Universität Linz, Linz, Austria

  Dieter Bäuerle

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