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Nanomanufacturing Automation

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Book cover Springer Handbook of Automation

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Abstract

This chapter reports the key developments for nanomanufacturing automation. Automated CAD guided nanoassembly can be performed by an improved atomic force microscopy (AFM). Although CAD guided automated manufacturing has been widely studied in the macro-world, nanomanufacturing is challenging. In nanoenvironments, the nanoobjects are usually distributed on a substrate randomly, so the nanoenvironment and the available nanoobjects have to be modeled in order to design a feasible nanostructure. Because of the positioning errors due to the random drift, the actual position of each nanoobject has to be identified by our local scanning method. The advancement of AFM increases the efficiency and accuracy to manipulate and assemble nanoobjects. Besides, the manufacturing process of carbon nanotube (CNT) based nanodevices is discussed. A novel automated manufacturing system has been especially designed for manufacturing nanodevices. The system integrates a new dielectrophoretic (DEP) microchamber into a robotic based deposition workstation and increases the yield to form semi-conducting CNTs for manufacturing nanodevices. Therefore, by using the proposed CNT separation and deposition system, CNT based nanodevices with specific and consistent electronic properties can be manufactured automatically and effectively.

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Abbreviations

AC:

alternating-current

AFM:

atomic force microscopy

CM:

Clausius–Mossotti

CNT:

carbon nanotube

DC:

direct-current

DEP:

dielectrophoretic

DNA:

deoxyribonucleic acid

IR:

infrared

MEMS:

micro-electromechanical system

MWCNT:

multi-walled carbon nanotube

NEMS:

nanoelectromechanical system

PECVD:

plasma enhanced chemical vapor deposition

SEM:

scanning electron microscopy

SEM:

strategic enterprise management

SWCNT:

single-walled carbon nanotube

UV:

ultraviolet

VOD:

virtual-object-destination

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Author information

Authors and Affiliations

  1. Electrical and Computer Engineering, Michigan State University, 2120 Engineering Building, 48824, East Lansing, MI, USA

    Ning Xi Dr

  2. Electrical and Computer Engineering, Michigan State University, 2120 Engineering Building, 48824, East Lansing, MI, USA

    King Wai Chiu Lai Dr

  3. US Corporate Research Center, ABB Inc., 2000 Day Hill Road, 06095, Windsor, CT, USA

    Heping Chen PhD

Authors
  1. Ning Xi Dr
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  2. King Wai Chiu Lai Dr
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  3. Heping Chen PhD
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Corresponding authors

Correspondence to Ning Xi Dr , King Wai Chiu Lai Dr or Heping Chen PhD .

Editor information

Editors and Affiliations

  1. PRISM Center, and School of Industrial Engineering, Purdue University, 315 N. Grant Street, 47907, West Lafayette, IN, USA

    Shimon Y. Nof

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© 2009 Springer-Verlag Berlin Heidelberg

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Xi, N., Lai, K.W.C., Chen, H. (2009). Nanomanufacturing Automation. In: Nof, S. (eds) Springer Handbook of Automation. Springer Handbooks. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-78831-7_53

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  • DOI: https://doi.org/10.1007/978-3-540-78831-7_53

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-540-78830-0

  • Online ISBN: 978-3-540-78831-7

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