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Plasma-Based Deposition and Processing Techniques for Optical Fiber Sensing

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Fiber Optic Sensors

Part of the book series: Smart Sensors, Measurement and Instrumentation ((SSMI,volume 21))

Abstract

Plasma-based techniques are widely applied for well-controlled deposition, etching or surface functionalization of a number of materials. It is difficult to imagine fabrication of novel microelectronic and optoelectronic devices without using plasma-enhanced deposition of thin films, their selective etching or functionalization of their surfaces for subsequent selective binding of chemical or biological molecules. Depending on the process parameters, i.e., generator frequency and power, composition of gases , pressure, temperature, and applied substrates, different effects of the process can be obtained. The chapter discusses current trends in application of plasma-based techniques for fabrication of novel optical sensing devices. Fabrication of materials with different structure (from amorphous to crystalline, porous, and multilayers), optical properties (absorption, refractive index ), and surface activity, as well as their processing are reviewed. Application of the plasma methods enhancing sensing properties of various optical fiber sensing structures, namely long-period gratings, intermodal interferometers based on photonic crystal fiber, sensing structures based on lossy mode resonance or stacks of nano-films are given as examples and are discussed.

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Authors and Affiliations

  1. Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Warsaw, Poland

    M. Dominik, M. Koba & M. Śmietana

  2. National Institute of Telecommunications, Warsaw, Poland

    M. Koba

  3. Faculty of Electronics, Telecommunications and Informatics, Gdańsk University of Technology, Gdańsk, Poland

    R. Bogdanowicz

  4. Centre de Recherche en Photonique, Université du Québec en Outaouais, Gatineau, QC, Canada

    W. J. Bock

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  1. M. Dominik
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  4. W. J. Bock
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  5. M. Śmietana
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  1. Public University of Navarra, Pamplona, Spain

    Ignacio R. Matias

  2. Waseda University, Kitakyushu, Fukuoka, Japan

    Satoshi Ikezawa

  3. Public University of Navarra, Pamplona, Spain

    Jesus Corres

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Dominik, M., Koba, M., Bogdanowicz, R., Bock, W.J., Śmietana, M. (2017). Plasma-Based Deposition and Processing Techniques for Optical Fiber Sensing. In: Matias, I., Ikezawa, S., Corres, J. (eds) Fiber Optic Sensors. Smart Sensors, Measurement and Instrumentation, vol 21. Springer, Cham. https://doi.org/10.1007/978-3-319-42625-9_5

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