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Semiconductors, Electrochemical Atomic Layer Deposition (E-ALD)

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Encyclopedia of Applied Electrochemistry

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Acknowledgment

Support of the National Science Foundation, Division of Materials Research, Award #1006747, is duly acknowledged.

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Authors and Affiliations

  1. University of Georgia, Athens, GA, 30602, USA

    John Stickney

Authors
  1. John Stickney
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Correspondence to John Stickney .

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Editors and Affiliations

  1. Eppstein, Germany

    Gerhard Kreysa

  2. Yokohama National University, Fac. Engineering, Yokohama, Japan

    Ken-ichiro Ota

  3. Case Western Reserve University, Cleveland, OH, USA

    Robert F. Savinell

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Stickney, J. (2014). Semiconductors, Electrochemical Atomic Layer Deposition (E-ALD). In: Kreysa, G., Ota, Ki., Savinell, R.F. (eds) Encyclopedia of Applied Electrochemistry. Springer, New York, NY. https://doi.org/10.1007/978-1-4419-6996-5_31

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