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Fabrication of Microscale Rotating Magnetic Machines

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Book cover Multi-Wafer Rotating MEMS Machines

Part of the book series: MEMS Reference Shelf ((MEMSRS))

Abstract

In this chapter, microfabrication techniques are discussed to enable miniaturized magnetic machines for use with silicon microturbomachinery. These rotational machines could be used as either motors (for motoring or fluidic pumping) or as generators for electrical power generation. Challenges and methods for microfabricating microscale magnetic machines are described, and examples of previously implemented devices are discussed.

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Author information

Authors and Affiliations

  1. Department of Electrical and Computer Engineering, University of Florida, 229 Benton Hall, 32611-6200, Gainesville, FL, USA

    David P. Arnold

  2. School of Electrical and Computer Engineering, Georgia Institute of Technology, 791 Atlantic Dr., 30332-0269, Atlanta, GA, USA

    Mark G. Allen

Authors
  1. David P. Arnold
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  2. Mark G. Allen
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Editor information

Editors and Affiliations

  1. Dept. Electrical Engineering &, Massachusetts Institute of Technology, Massachusetts Ave. 77, Cambridge, 02139-4307, U.S.A.

    Jeffrey Lang

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Arnold, D.P., Allen, M.G. (2009). Fabrication of Microscale Rotating Magnetic Machines. In: Lang, J. (eds) Multi-Wafer Rotating MEMS Machines. MEMS Reference Shelf. Springer, Boston, MA. https://doi.org/10.1007/978-0-387-77747-4_5

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  • DOI: https://doi.org/10.1007/978-0-387-77747-4_5

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  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-0-387-77746-7

  • Online ISBN: 978-0-387-77747-4

  • eBook Packages: EngineeringEngineering (R0)

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