Skip to main content

Microfabricated Biosensing Devices: MEMS, Microfluidics, and Mass Sensors

  • Chapter
Biosensing

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 129.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 169.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 169.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  • Andersson, S.M.H., and A. van den Berg. 2003. Microfluidic devices for cellomics: A review. Sensors and Actuators B (Chemical) 92:315–325.

    Article  Google Scholar 

  • Arntz, Y., J.D. Seelig, H.P. Lang, J. Zhang, P. Hunziker, J.P. Ramseyer, E. Meyer, M. Hegner, and C. Gerber. 2003. Label-free protein assay based on a nanomechanical cantilever array. Nanotechnology (UK) 14 (1):86–90.

    Article  ADS  Google Scholar 

  • Baba, Y., S. Shoji, and A. van den Berg, eds. 2003. Micro Total Analysis Systems, 2002: Proceedings of the μTAS 2002 symposium. Boston, MA: Kluwer Academic Publishers.

    Google Scholar 

  • Ballantine, D.S., R.M. White, S.J. Martin, A.J. Ricco, G.C. Frye, E.T. Zellers, and H Wohltjen. 1997. Acoustic wave sensors: Theory, design, and physico-chemical applications. San Diego: Academic Press.

    Google Scholar 

  • Bell, T.E., K.D. Wise, and D.J. Anderson. 1998. A flexible micromachined electrode array for a cochlear prosthesis. Sensors and Actuators A 66:63–69.

    Article  Google Scholar 

  • Boone, T.D., Z.H. Fan, I. Gibbons, A.J. Ricco, H. Tan, and S.J. Williams. 2002. Plastic advances microfluidic devices. Anal. Chem. 74:78A-86A.

    Article  Google Scholar 

  • Bousse, L., S. Mouradian, A. Minalla, H. Yee, K. Williams, and R. Dubrow. 2001. Protein sizing on a microchip. Anal. Chem. 73:1207–1212.

    Article  Google Scholar 

  • Burns, M.A., B.N. Johnson, and S.H. Brahmasandra. 1998. An integrated nanoliter DNA analysis device. Science 282: 484–487.

    Article  ADS  Google Scholar 

  • Cavicchi, R.E., J.S. Suehle, K.G. Kreider, M. Gaitan, and P. Chaparala. 1995. Fast temperature programmed sensing for micro-hotplate gas sensors. IEEE Electron Device Letters 16:286–288.

    Article  ADS  Google Scholar 

  • Cleland, A.N., and M.L. Roukes. 2002. Noise processes in nanomechanical resonators. J. Appl. Phys. 92:2758–2769.

    Article  ADS  Google Scholar 

  • Cooper, M.A., F.N. Dultsev, A. Minson, C. Abell, P. Ostanin, and D. Klenerman. 2001. Direct and sensitive detection of a human virus by rupture event scanning. Nature Biotech. 19:833–837.

    Article  Google Scholar 

  • Duffy, D.C., H. L. Gillis, J. Lin, N.F. Sheppard, Jr., and G.J. Kellogg. 1999. Microfabricated centrifugal microfluidic systems: characterization and multiple enzymatic assays. Anal. Chem. 71:4669–4678.

    Article  Google Scholar 

  • Figeys, D., and D. Pinto. 2000. Lab-on-a-chip: A revolution in biological and medical sciences. Anal. Chem. 72:330A-335A.

    Article  Google Scholar 

  • Fu, A.Y., H.P. Chou, C. Spence, F.H. Arnold, and S.R. Quake. 2002. An integrated microfabricated cell sorter. Anal. Chem. 74:2451–2457.

    Article  Google Scholar 

  • Gizeli E., and C. R. Lowe, eds. 2002. Biomolecular Sensors. London: Taylor and Frances.

    Google Scholar 

  • Gottschlich, N., S.C. Jacobson, C.T. Culbertson, and J.M. Ramsey. 2001. Two-dimensional electrochromatography/capillary electrophoresis on a microchip. Anal. Chem. 73:2669–2674.

    Article  Google Scholar 

  • Gustafsson, M., D. Hirschberg, C. Palmberg, H. Jörnvall, and T. Bergman. 2004. Integrated sample preparation and MALDI mass spectrometry on a microfluidic compact disk. Analytical Chemistry 76:253–502.

    Article  Google Scholar 

  • Hadd, A.G., S.C. Jacobson, and J.M. Ramsey. 1999. Microfluidic assays of acetylcholinesterase inhibitors. Anal. Chem. 71:5206–5212.

    Article  Google Scholar 

  • Hagleitner, C., A. Hierlemann, D. Lange, A. Kummer, N. Kerness, O. Brand, and H. Baltes. 2001. Smart single-chip gas sensor microsystem. Nature 414:293–296.

    Article  ADS  Google Scholar 

  • Handley, J. 2001. Quartz crystal microbalances. Anal. Chem. 73:225A–229A.

    Google Scholar 

  • Howe, R.T., M. Allen, A. Berlin, E. Hui, D. Monk, K. Najafi, and M. Yamakawa. 2003. WTEC Panel Report on Microsystems Research in Japan. Baltimore, MD: World Technology Evaluation Center, Inc. Available from National Technical Information Service (Springfield, VA) and online at www.wtec.org/mems1/.

    Google Scholar 

  • Khandurina, J., T.E. McKnight, S.C. Jacobson, L.C. Waters, R.S. Foote, and J. M. Ramsey. 2000. Integrated system for rapid PCR-based DNA analysis in microfluidic devices. Anal. Chem. 72:2995–3000.

    Article  Google Scholar 

  • Kiss, L., P.B. Bennett, V/N. Uebele, K.S. Koblan, S.A. Kane, B. Neagle, and K. Schroeder. 2003. High throughput ion-channel pharmacology: planar-array-based voltage clamp. ASSAY and Drug Development Technologies 1:127–135.

    Article  Google Scholar 

  • Koh, C.G., W. Tan, M. Zhao, A.J. Ricco, and Z.H. Fan. 2003. Integrating PCR, valving, and electrophoresis in a plastic device for bacterial detection. Anal. Chem. 75:4591–4598.

    Article  Google Scholar 

  • Kristensen Bjarne, B.W., J. Noraberg, P. Thiébaud, M. Koudelka-Hep, and J. Zimmer. 2001. Biocompatibility of Si-based arrays of electrodes coupled to organotypic hippocampal brain slice cultures. Brain Research 896 (1):1–17.

    Article  Google Scholar 

  • Lagally, E.T., C.A. Emrich, and R.A. Mathies. 2001. Fully integrated PCR-capillary electrophoresis microsystem for DNA analysis. Lab-on-a-Chip 1:102–107.

    Article  Google Scholar 

  • Li, J., T. LeRiche, T.L. Tremblay, C. Wang, E. Bonneil, D.J. Harrison, and P. Thibault. 2002. Application of microfluidic devices to proteomics research. Molecular & Cellular Proteomics 1.2:157–168.

    Article  Google Scholar 

  • Liu, T., J. Tang, M. Han, and L. Jiang, 2003. A novel microgravimetric DNA sensor with high sensitivity. Biochem Biophys Res Commun. 304:98–100.

    Article  Google Scholar 

  • Locascio, L.E., J. Hong, and M. Gaitan. 2002. Liposomes as signal amplification reagents for assays in microfluid channels. Electrophoresis 23 (5):799–804.

    Article  Google Scholar 

  • Madou, M.J., L.J. Lee, S. Daunert, S. Lai, and C.H. Shih, 2001. Design and fabrication of CD-like microfluidic platforms for diagnostics: Microfluidic functions. Biomedical Microdevices 3 (3):245–254.

    Article  Google Scholar 

  • Manz, A., D.J. Harrison, E.M.J. Verpoorte, J.C. Fettinger, A. Paulus, H. Lüdi, and H.M. Widmer. 1992. Planar chips technology for miniaturization and integration of separation techniques into monitoring systems: Capillary electrophoresis on a chip. J. Chromatogr. 593:253–258.

    Article  Google Scholar 

  • Ming, S., S. Li, and V.P. Dravid. 2003. Microcantilever resonance-based DNA detection with nanoparticle probes. Appl. Phys. Lett. (USA) 82 (20):3562–4.

    ADS  Google Scholar 

  • Möller, M., J.P. Spatz, M. Moessmer, P. Eibeck, P. Ziemann, and B. Kabius. 1999. Formation of chemical nanopattern by means of block copolymers. Polymeric Materials Science and Engineering 80:3.

    Google Scholar 

  • Ng, H.T., J. Li, M.K. Smith, P. Nguyen, A. Cassell, J. Han, and M. Meyyappan. 2003. Growth of epitaxial nanowires at the junctions of nanowalls. Science 300:1249.

    Article  Google Scholar 

  • Northrup, M.A., K.V. Jensen, and D.J. Harrison, eds. 2003. Proceedings of μTAS 2003 (Seventh International Conference on Micro Total Analysis Systems). Cleveland, OH: Transducers Research Foundation.

    Google Scholar 

  • Oosterbroek, R.E., and A. van den Berg, eds. 2003. Lab-on-a-chip: Miniaturized systems for (bio)chemical analysis and synthesis and references therein. Elsevier: Amsterdam.

    Google Scholar 

  • Petricoin, E.F., III, D.K. Ornstein, C.P. Paweletz, A. Ardekani, P.S. Hackett, B.A. Hitt, A. Velassco, C. Trucco, L. Wiegand, K. Wood, C.B. Simone, P.J. Levine, W. M. Linehan, M.R. Emmert-Buck, S.M. Steinberg, E.C. Kohn, and L.A. Liotta. 2002. Serum proteomic patterns for detection of prostate cancer. J. Natl. Cancer. Inst. 94:1576–1578.

    Google Scholar 

  • Ricco, A.J., R.M. Crooks, and G.C. Osbourn. 1998. SAW chemical sensor arrays: New chemically sensitive interfaces combined with novel cluster analysis to detect volatile organic compounds and mixtures. Accts. Chem. Res. 31:289.

    Article  Google Scholar 

  • Rossier, J.S., and H.H. Girault. 2001. Enzyme linked immunosorbent assay on a microchip with electrochemical detection. Lab on a Chip 1:153–157.

    Article  Google Scholar 

  • Sanders, G.H.W., and A. Manz. 2000. Chip-based microsystems for genomic and proteomic analysis. Trends Anal. Chem. 19:364–378.

    Article  Google Scholar 

  • Sato, K., H. Kawanishi, M. Tokeshi, T. Kitamori, and T. Sawada. 1999. Sub-zeptmole molecule detection in a microfabricated glass channel by thermal lens microscope. Anal. Sci. 15:525–529.

    Article  Google Scholar 

  • Sato, K., M. Yamanaka, H. Takahashi, M. Tokeshi, H. Kimura, and T. Kitamori. 2002. Electrophoresis 23:734–739.

    Article  Google Scholar 

  • Scott R.W.J., A.K. Datye, and R.M. Crooks. 2003. Bimetallic palladium-platinum dendrimer-encapsulated catalysts. J. Am. Chem. Soc. 125:3708–3709.

    Article  Google Scholar 

  • Smith, J., and S. Senturia. 1995. Self-consistent temperature compensation for resonant sensors with application to quartz bulk acoustic wave chemical sensors. Proc.Transducers 9 5 (2): 724–727, Stockholm: Foundation for Sensor and Actuator Technology.

    Google Scholar 

  • Soper, S.A., S.M. Ford, S. Qi, R.L. McCarley, K. Kelly, and M.C. Murphy. 2000. Anal. Chem. 72:642A–651A.

    Article  Google Scholar 

  • Subramanian, A., P.I. Oden, S.J. Kennel, K.B. Jacobson, R.J. Warmack, T. Thundat, and M.J. Doktycz. 2002. Glucose biosensing using an enzyme-coated microcantilever. Appl. Phys. Lett. (USA) 81 (2):385–7.

    Article  ADS  Google Scholar 

  • Tamayo, J., M. Alvarez, and L.M. Lechuga. 2003. Digital tuning of the quality factor of micromechanical resonant biological detectors. Sens. Actuators B, Chem. (Switzerland) B89 (1–2):33–9.

    Article  Google Scholar 

  • Tang, T., M.Y. Badal, G. Ocvirk, W.E. Lee, D.E. Bader, F. Bekkaoui, and D.J. Harrison. 2002. Integrated microfluidic electrophoresis system for analysis of genetic materials using signal amplification methods. Anal. Chem. 74:725–733.

    Article  Google Scholar 

  • Walther, I., B.H. van der Schoot, S. Jeanneret, Ph. Arquint, N.F. de Rooij, V. Gass, Bechler, G. Lorenzi, and A. Cogoli. 1994. Development of a miniature bioreactor for continuous culture in a space laboratory, J. Biotechnology 38:21–32.

    Article  Google Scholar 

  • Wang, J., A. Iba´nËœez, M.P. Chatrathi, and A. Escarpa. 2001. Electrochemical enzyme immunoassays on microchip platforms. Anal. Chem. 73:5323–5327.

    Article  Google Scholar 

  • Woolley, A.T., and R.A. Mathies. 1994. Proc. Natl. Acad. Sci. USA 91:11348–11352.

    Article  ADS  Google Scholar 

  • Wu, G., R.H. Datar, K.M. Hansen, T. Thundat, R.J. Cote, and A. Majumdar. 2001. Bioassay of prostate-specific antigen (PSA) using microcantilevers. Nat. Biotechnol. 19:856.

    Article  ADS  Google Scholar 

  • Xu, J., X.B. Wang, E. Brooks, M. Li, L. Wu, A. Guia, and J.Q. Xu. 2001. Ion-channel assay technologies: Quo vadis? Drug Discovery Today 6 (24):1278–1287.

    Article  Google Scholar 

  • Yang, Y., H.F. Ji, and T. Thundat. 2003. Nerve agents detection using a Cu2+ /L-cysteine bilayer-coated microcantilever. J. Am. Chem. Soc. 125:1124–5.

    Article  Google Scholar 

  • Zubritsky, E. 2000. E-noses keep an eye on the future. Anal. Chem. 72:421A–426A.

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

Copyright information

© 2006 Springer

About this chapter

Cite this chapter

Ricco, A.J. (2006). Microfabricated Biosensing Devices: MEMS, Microfluidics, and Mass Sensors. In: Biosensing. Springer, Dordrecht. https://doi.org/10.1007/1-4020-4058-X_6

Download citation

Publish with us

Policies and ethics