Abstract
As we discussed in Chapter 1, the scanning electron microscope (SEM) was invented soon after the TEM but took longer to be developed into a practical tool for scientific research. As happened with the TEM, the spatial resolution of the instrument improved after magnetic lenses were substituted for electrostatic ones and after a stigmator was added to the lens column. Today, scanning electron microscopes outnumber transmission electron microscopes and are used in many fields, including medical and materials research, the semiconductor industry, and forensic-science laboratories.
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© 2005 Springer Science+Business Media, Inc.
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Egerton, R.F. (2005). The Scanning Electron Microscope. In: Physical Principles of Electron Microscopy. Springer, Boston, MA. https://doi.org/10.1007/0-387-26016-1_5
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DOI: https://doi.org/10.1007/0-387-26016-1_5
Publisher Name: Springer, Boston, MA
Print ISBN: 978-0-387-25800-3
Online ISBN: 978-0-387-26016-7
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