Abstract
A new straightness error measurement optical system has been developed. This system consists of three components: ( i ) A He-Ne Zeeman laser, ( ii ) A grating secured onto a slide table and (iii ) A heterodyne interferometer where a beat signal, which includes a phase shift δ φ depending on an in-plane displacement δ x of the grating, is generated. Straightness error can be measured, because δ φ is proportional to δ x In this study, using this system, straightness error of a slide table is measured experimentally. Straightness error measured by this system is good agreement with one measured by a commercial laser interferometer system. The effectiveness of this system is confirmed by this result.
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References
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© 2002 Kluwer Academic Publishers
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Asano, S., Goto, T., Tanimura, H., Mitsui, K. (2002). Development of a new measurement system for straightness error by a heterodyne interferometer with a grating. In: Inasaki, I. (eds) Initiatives of Precision Engineering at the Beginning of a Millennium. Springer, Boston, MA. https://doi.org/10.1007/0-306-47000-4_157
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DOI: https://doi.org/10.1007/0-306-47000-4_157
Publisher Name: Springer, Boston, MA
Print ISBN: 978-0-7923-7414-5
Online ISBN: 978-0-306-47000-4
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