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Low cost fabrication of microelectrodes on plastic substrate

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Abstract

A low cost method of fabricating thick film microelectrodes on plastic substrate for producing integrated plastic biochips is introduced in this paper. Microelectrodes for pumping liquid in a PCR plastic biochip were successfully fabricated using a metal stamp and commercially available Au films. Testing results show that the microelectrode produced with the metal stamp is more reliable and can last longer than those fabricated with sputtering techniques. The fabrication method demonstrated in this paper provides a new low cost technology that is suitable for mass production of thick-film microelectrodes of high electrical conductivity on plastic biochips.

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Acknowledgments

The research was supported by a GRF fund from the Research Grants Council of Hong Kong SAR (Ref. No.: PolyU 5326/08E) and a fund from the Innovative Technology Commission of Hong Kong SAR (Ref. No.: ITS/030/07).

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Authors and Affiliations

  1. Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hung Hom, Kowloon, Hong Kong, China

    Yan Xu, Long-Biao Huang, Kai-Leung Yung & Yun-Chuan Xie

  2. Department of Applied Chemistry, Xi’an Jiaotong University, Xi’an, 710049, China

    Yun-Chuan Xie

  3. Department of Health Technology & Informatics, The Hong Kong Polytechnic University, Hung Hom, Kowloon, Hong Kong, China

    Thomas Ming-Hung Lee

Authors
  1. Yan Xu
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  2. Long-Biao Huang
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  3. Kai-Leung Yung
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  4. Yun-Chuan Xie
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  5. Thomas Ming-Hung Lee
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Correspondence to Yan Xu.

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Xu, Y., Huang, LB., Yung, KL. et al. Low cost fabrication of microelectrodes on plastic substrate. Microsyst Technol 17, 361–366 (2011). https://doi.org/10.1007/s00542-011-1278-y

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  • DOI: https://doi.org/10.1007/s00542-011-1278-y

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