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Scanning Electron Microscopy and X-Ray Microanalysis

Third Edition

  • Textbook
  • © 2003

Overview

Authors:
  1. Joseph I. Goldstein

    1. University of Massachusetts, Amherst, USA

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    You can also search for this author in PubMed   Google Scholar

  2. Dale E. Newbury

    1. National Institute of Standards and Technology, Gaithersburg, USA

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  3. Patrick Echlin

    1. Cambridge Analytical Microscopy Ltd., Cambridge, England

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  4. David C. Joy

    1. University of Tennessee, Knoxville, USA

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  5. Charles E. Lyman

    1. Lehigh University, Bethlehem, USA

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  6. Eric Lifshin

    1. State University at Albany, Albany, USA

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  7. Linda Sawyer

    1. Ticona LLC, Summit, USA

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  8. Joseph R. Michael

    1. Sandia National Laboratories, Albuquerque, USA

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  • The text has been used in educating over 3,000 students at the Lehigh SEM short course as well as thousands of undergraduate and graduate students at universities in every corner of the globe

  • The authors have made extensive changes to the text and figures in this edition as a result of their experience in teaching the various concepts of SEM and x-ray microanalysis

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Table of contents (15 chapters)

  1. Front Matter

    Pages i-xix
    Download chapter PDF

  2. Introduction

    • Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.
    Pages 1-20

  3. The SEM and Its Modes of Operation

    • Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.
    Pages 21-60

  4. Electron Beam–Specimen Interactions

    • Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.
    Pages 61-98

  5. Image Formation and Interpretation

    • Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.
    Pages 99-193

  6. Special Topics in Scanning Electron Microscopy

    • Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.
    Pages 195-270

  7. Generation of X-Rays in the SEM Specimen

    • Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.
    Pages 271-296

  8. X-Ray Spectral Measurement: EDS and WDS

    • Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.
    Pages 297-353

  9. Qualitative X-Ray Analysis

    • Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.
    Pages 355-390

  10. Quantitative X-Ray Analysis: The Basics

    • Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.
    Pages 391-451

  11. Special Topics in Electron Beam X-Ray Microanalysis

    • Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.
    Pages 453-536

  12. Specimen Preparation of Hard Materials: Metals, Ceramics, Rocks, Minerals, Microelectronic and Packaged Devices, Particles, and Fibers

    • Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.
    Pages 537-564

  13. Specimen Preparation of Polymer Materials

    • Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.
    Pages 565-590

  14. Ambient-Temperature Specimen Preparation of Biological Material

    • Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.
    Pages 591-619

  15. Low-Temperature Specimen Preparation

    • Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.
    Pages 621-645

  16. Procedures for Elimination of Charging in Nonconducting Specimens

    • Joseph I. Goldstein, Dale E. Newbury, Patrick Echlin, David C. Joy, Charles E. Lyman, Eric Lifshin et al.
    Pages 647-673

  17. Back Matter

    Pages 675-690
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Keywords

About this book

In the decade since the publication of the second edition of Scanning Electron Microscopy and X-Ray Microanalysis, there has been a great expansion in the capabilities of the basic scanning electron microscope (SEM) and the x-ray spectrometers. The emergence of the variab- pressure/environmental SEM has enabled the observation of samples c- taining water or other liquids or vapor and has allowed for an entirely new class of dynamic experiments, that of direct observation of che- cal reactions in situ. Critical advances in electron detector technology and computer-aided analysis have enabled structural (crystallographic) analysis of specimens at the micrometer scale through electron backscatter diffr- tion (EBSD). Low-voltage operation below 5 kV has improved x-ray spatial resolution by more than an order of magnitude and provided an effective route to minimizing sample charging. High-resolution imaging has cont- ued to develop with a more thorough understanding of how secondary el- trons are generated. The ?eld emission gun SEM, with its high brightness, advanced electron optics, which minimizes lens aberrations to yield an - fective nanometer-scale beam, and “through-the-lens” detector to enhance the measurement of primary-beam-excited secondary electrons, has made high-resolution imaging the rule rather than the exception. Methods of x-ray analysis have evolved allowing for better measurement of specimens with complex morphology: multiple thin layers of different compositions, and rough specimens and particles. Digital mapping has transformed classic x-ray area scanning, a purely qualitative technique, into fully quantitative compositional mapping.

Reviews

“There is no other single volume that covers as much theory and practice of SEM or X-ray microanalysis as Scanning Electron Microscopy and X-ray Microanalysis, 3rd Edition does. It is clearly written ... well organized. ... This is a reference text that no SEM or EPMA laboratory should be without.” (Thomas J. Wilson, Scanning, Vol. 27 (4), July/August, 2005)

“As the authors pointed out, the number of equations in the book is kept to a minimum, and important conceptions are also explained in a qualitative manner. A lot of very distinct images and schematic drawings make for a very interesting book and help readers who study scanning electron microscopy and X-ray microanalysis. The principal application and sample preparation given in this book are suitable for undergraduate students and technicians learning SEEM and EDS/WDS analyses. It is an excellent textbook for graduate students, and an outstanding reference for engineers, physical, and biological scientists.” (Microscopy and Microanalysis, Vol. 9 (5), October, 2003)

Authors and Affiliations

  • University of Massachusetts, Amherst, USA

    Joseph I. Goldstein

  • National Institute of Standards and Technology, Gaithersburg, USA

    Dale E. Newbury

  • Cambridge Analytical Microscopy Ltd., Cambridge, England

    Patrick Echlin

  • University of Tennessee, Knoxville, USA

    David C. Joy

  • Lehigh University, Bethlehem, USA

    Charles E. Lyman

  • State University at Albany, Albany, USA

    Eric Lifshin

  • Ticona LLC, Summit, USA

    Linda Sawyer

  • Sandia National Laboratories, Albuquerque, USA

    Joseph R. Michael

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